Effect of energetic particle bombardment on microstructure of zinc oxide films deposited by RF magnetron sputtering

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文

著者

• Furuta Mamoru

  Research Institute For Nano-devices Kochi University Of Technology

• Hirao Takashi

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Hirao Takashi

  Department Of Electrical Engineering Osaka University

• Hiramatsu Takahiro

  Res. Inst. For Nanodevices Kochi Univ. Of Technol. 185 Miyanokuchi Tosayamada-cho Kami Kochi 782-850

• Matsuda Tokiyoshi

  Research Institute Kochi University Of Technology

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