Structural Analysis of High-Density Vertically Aligned Carbon Nanotubes Grown by Thermal Chemical Vapor Deposition with Fe/Al Multilayer Catalyst
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概要
- 論文の詳細を見る
A detailed structural analysis has been carried out on vertically aligned carbon nanotubes (CNTs) formed by thermal chemical vapor deposition (CVD) with an Fe/Al multilayer catalyst on a Si substrate. From the results, it was confirmed that the CNTs are composed of two configurations, namely high-density vertically aligned CNTs formed on the catalyst, followed by randomly oriented thin CNTs with low crystallinity formed on the high-density CNTs. Growth kinetics was proposed by considering the dependence of the CNT growth rate on the size of catalyst grains.
- 2006-11-15
著者
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Furuta Mamoru
Research Institute For Nano-devices Kochi University Of Technology
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AOKI Katsunori
Nitta Haas Company
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HIRAO Takashi
Research Institute, Kochi University of Technology
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Furuta Hiroshi
Research Institute For Nano-devices Kochi University Of Technology
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Komukai Takuji
Nitta Corporation
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Oura Kenjiro
Research Center for Ultra High Voltage Electron Microscopy, Osaka University, 7-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan
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Aoki Katsunori
Nitta Haas Inc., 172 Ikezawa-cho, Yamatokoriyama, Nara 639-1032, Japan
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Komukai Takuji
Nitta Haas Inc., 172 Ikezawa-cho, Yamatokoriyama, Nara 639-1032, Japan
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Furuta Mamoru
Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kochi 782-8502, Japan
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Hirao Takashi
Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kochi 782-8502, Japan
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Hirao Takashi
Research Institute for Nanodevices, Kochi University of Technology, Kami, Kochi 782-8502, Japan
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