Low-Temperature Growth of Carbon Nanofiber by Thermal Chemical Vapor Deposition Using CuNi Catalyst

概要

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Thermal-CVD was carried out for the low-temperature growth of carbon nanofibers (CNFs) using a CuNi alloy catalyst film with a thickness of 5 nm on Si in a gas mixture of C2H2 and He ($\text{C$_{2}$H$_{2}$/He}=3/12$ sccm). The experimental results obtained using the CuNi alloy catalyst film were compared with those obtained using the Fe, Ni, and FeNi catalyst films with the same thickness of 5 nm. It was shown that an amorphous CNF with a diameter of 20 nm can be grown even at 400 °C using the CuNi catalyst film, but not using the Fe, Ni and FeNi catalysts. A reduction in the growth temperature of CNFs was considered to be achieved using small CuNi catalyst particles with a comparatively smaller surface energy than FeNi catalyst particles.
2006-06-15