Method for Aligned Bamboolike Carbon Nanotube Growth Using RF Magnetron Sputtering
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概要
- 論文の詳細を見る
We present a method for aligned bamboolike carbon nanotube (CNT) growth using RF magnetron sputtering. It has been revealed that aligned CNTs can be synthesized by adopting a hot filament in the sputtering system, as demonstrated for CNTs on an Ni/Si substrate. The resultant CNTs were found to be aligned vertically on the substrate with uniform height and have a bamboolike structure. Similar results were obtained for sputtering deposition under a negative sample bias, indicating that the effect of the hot filament can be attributed to the energy enhancement of the carbon particles impinging on the growth front, which plays an essential role in the growth of CNTs by sputtering.
- 2003-02-15
著者
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Tsuji Keita
Department Of Electronic Engineering Graduate School Of Engineering Osaka University
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Honda Shin-ichi
Department Of Electronic Engineering Graduate School Of Engineering Osaka University
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Lee Kuei-yi
Department Of Electronic Engineering Graduate School Of Engineering Osaka University
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Katayama Mitsuhiro
Department Of Electronic Engineering Graduate School Of Engineering Osaka University
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Fujimoto Keiichi
Department Of Electronic Engineering Graduate School Of Engineering Osaka University
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Ikuno Takashi
Department Of Electric Engineering Graduate School Of Engineering Osaka University
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Oura Kenjiro
Department Of Elecronic Engineering Graduate School Of Engineering Osaka University
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Ohkura Shigeharu
Department Of Electronic Engineering Graduate School Of Engineering Osaka University
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Hirao Takashi
Department Of Chemistry Faculty Of Science And Technology Keio University
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Fujimoto Keiichi
Department of Electronic Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Katayama Mitsuhiro
Department of Elecronic Engineering, Graduate School of Engineering, Osaka University
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Tsuji Keita
Department of Electronic Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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