Fabrication and Characteristics of Amorphous Carbon Films Grown in Pure Methane Plasma by using Radio Frequency Plasma Enhanced Chemical Vapor Deposition

スポンサーリンク

概要

• 論文の詳細を見る

• Amorphous carbon (a-C) films were fabricated in pure methane plasma by using the radio frequency plasma-enhanced chemical vapor deposition (RF PECVD) system. Surface morphology and roughness of the films were examined as a function of substrate temperature by atomic force microscopy (AFM). Field emission from the a-C films was examined as a function of substrate temperature. We found that the roughness and the emission current of the films were improved considerably when the substrate temperature was higher than 600°C. From the results obtained by Raman spectroscopy, growth of graphite crystallites was promoted at high substrate temperature. Moreover, the surface morphology was abruptly changed at high substrate temperatures over 600°C. We discuss the field emission characteristics of the a-C films with regard to the surface morphology and the structural features.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-04-15

著者

• Honda Shin-ichi

  Department Of Electronic Engineering Graduate School Of Engineering Osaka University

• Katayama Mitsuhiro

  Department Of Electronic Engineering Graduate School Of Engineering Osaka University

• Ryu Jeong-tak

  Department Of Computer And Communication Engineering Daegu University

• Ikuno Takashi

  Department Of Electric Engineering Graduate School Of Engineering Osaka University

• Baek Yang-gyu

  Department Of Electronic Engineering Graduate School Of Engineering Osaka University

• Oura Kenjiro

  Department Of Elecronic Engineering Graduate School Of Engineering Osaka University

• Hirao Takashi

  Department Of Chemistry Faculty Of Science And Technology Keio University

• Ikuno Takashi

  Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan

• Oura Kenjiro

  Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan

• Cho Kyung-Jea

  Center for Laboratory Facilities, Daegu University, 15 Naeri, Jinryang, Gyeongsan, Gyeongbuk 712-714, Korea

• Hirao Takashi

  Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan

• Baek Yang-Gyu

  Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan

• Ryu Jeong-Tak

  Department of Computer and Communication Engineering, Daegu University, 15 Naeri, Jinryang, Gyeongsan, Gyeongbuk 712-714, Korea

• Katayama Mitsuhiro

  Department of Elecronic Engineering, Graduate School of Engineering, Osaka University

• Katayama Mitsuhiro

  Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan

関連論文

• 触媒金属微粒子制御による垂直配向カーボンナノチューブ薄膜の作製
• マグネトロンスパッタ法を用いたカーボンナノチューブの直径及び密度制御
• 27aYL-5 カーボンナノチューブ(CNT)を用いた高強度レーザー吸収率増大実験(核融合プラズマ(慣性)(高速点火),領域2,プラズマ基礎・プラズマ科学・核融合プラズマ・プラズマ宇宙物理)
• 24pQE-9 カーボンナノチューブによるレーザーエネルギー吸収率の増大効果(慣性核融合(ハイドロ・診断・高速点火),領域2,プラズマ基礎・プラズマ科学・核融合プラズマ・プラズマ宇宙物理)
• カーボンナノチューブを用いた超高感度ガスセンサー開発
• カーボンナノチューブ束ピラー配列からの電界電子放出特性と安定性の評価(電子管と真空ナノエレクトロニクス及びその評価技術)
• エージングによる印刷型カーボンナノチューブエミッターの発光均一性と寿命特性の改善(電子管と真空ナノエレクトロニクス及びその評価技術)
• カーボンナノチューブセンサのガス検知特性
• Electrical Characterization of Metal-Coated Carbon Nanotube Tips
• ナノカーボン材料の形態制御とデバイス応用探索
• 3. 誘導結合RFプラズマCVD法によるカーボンナノチューブ配向成長(プラズマプロセスによるカーボンナノチューブ配向成長の現状と課題)
• 高周波マグネトロンスパッタ法による炭素系薄膜の作製と評価
• Formation of Vertically Aligned Carbon Nanotubes by Dual-RF-Plasma Chemical Vapor Deposition : Surfaces, Interfaces, and Films
• Development of New Apparatus for Field Emission Measurement
• 24pXC-1 金属被覆カーボンナノチューブ探針の電気伝導特性(ナノワイヤ・ナノチューブ,領域9(表面・界面, 結晶成長))
• 20aPS-79 独立駆動型 4 探針 STM を用いた CNT 電気伝導測定
• Formation of Graphite Layers during Carbon Nanotubes Growth
• Synthesis of Aligned Carbon Nanofibers at 200℃
• Scanning Tunneling Microscopy Study of the c(4X4) Structure Formation in the Sub-Monolayer Sb/Si(100) System : Surfaces, Interfaces, and Films
• Mg/Si(100) Reconstructions Studied by Scanning Tunneling Microscopy
• Composition and Surface Structure of Quantum Chains on a In/Si(111)Surface
• Atomic Hydrogen Interaction with the Si(100)4×3-In Surface Studied by Scanning Tunneling Microseopy
• Si(111)2×2-In ↔ Si(111)?×?-In Scanning Tunneling Microscope Tip-Induced Structural Transformation ( Scanning Tunneling Microscopy)
• Methodology for Accurate Oxygen Distribution Analysis and Its Application to YBa_2Cu_3O_x Thin Films Using ^O(α, α)^O 3.045 MeV Resonance Reaction
• Effects of Post-Annealing on Oxygen Content of Indium Tin Oxide Films Fabricated by Reactive Sputtering
• Depth Profiling of Oxygen Concentration of Indium Tin Oxide Films Fabricated by Reactive Sputtering
• Metal-Coated Carbon Nanotube Tip for Scanning Tunneling Microscope
• Effect of Substrate Surface Phase on the Shape of Self-Organized Al Nanoclusters on Si(100) Formed upon Atomic Hydrogen Exposure
• 熱化学気相成長法によるカーボンナノチューブ : 金属微粒子間架橋構造の形成
• 高真空レーザアブレーション法による炭素粒子を核としたカーボンナノチューブの作製と評価
• カーボンナノ構造の低温作製
• Single-Walled Carbon Nanotube Thin-Film Sensor for Ultrasensitive Gas Detection
• Thermal Stability in the Morphology of Ge Films on Si(001) Grown by Hydrogen-Surfactant-Mediated Epitaxy
• Influence of Hydrogen-Surfactant Coverage on Ge/Si(001) Heteroepitaxy : Surfaces, Interfaces, and Films
• Influence of Mn Incorporation on Molecular Beam Epitaxial Growth of GaMnN Film :Surfaces, Interfaces, and Films
• Hydrogen Segregation and Its Detrimental Effect in Epitaxial Growth of Ge Thin Film on Hydrogen-Terminated Si(001) Surface : Surfaces Interfaces, and Films
• Coaxial Impact-Collision Ion Scattering Spectroscopy and Time-of-Flight Elastic Recoil Detection Analysis for In Situ Monitoring of Surface Processes in Gas Phase Atmosphere : Surfaces, Interfaces, and Films
• Structural Analysis of 6H-SiC(0001)√ × √ Reconstructed Surface
• Silver-Induced 3 × 3 Phase on 6H-SiC(0001)√ × √ Surface
• Adsorption of Atomic Hydrogen on Ag-Covered 6H-SiC(0001) Surface
• Direct Observation of Strained Layer Formation at the Initial Stage of In Thin Film Growth on Si(100)
• Total Cross Section of Electron Stimulated Desorption of Hydrogen from Hydrogen-Terminated Ge/Si(001) as Observed by Time of Flight Elastic Recoil Detection Analysis
• Adsorption of H on the Ge/Si(001) Surface as Studied by Time-of-Flight Elastic Recoil Detection Analysis and Coaxial Impact Collision Ion Scattering Spectroscopy
• Adsorption of Atomic Eydrogen on the Si(100)-(2×1)-Sb Surface
• Discussion on Modulation Methods for Flyback-type Single-Phase Inverters with Enhanced Power Decoupling for Photovoltaic AC Module Systems
• A New Apparatus for Impact Collision Ion Scattering Spectroscopy
• Ion Channeling Study of Epitaxially Grown HoBa_2Cu_3O_x Thin Films on MgO(001)
• Immunohistochemical Study of Tumor-Infiltrating Lymphocytes Before and After Intravesical Bacillus Calmette-Guerin Tratment for Superficial Bladder Cancer
• Hydrogen-Induced Ag Cluster Formation on the Si(111)√3×√3(R30°)-Ag Surface Observed by Scanning Tunneling Microscopy
• Scanning Tunneling Microscope Observation of Si(111)-3×1-Ag Structure
• Growth Processes of Si(111)-√×√-Ag Studied by Scanning Tunrueling Microscope
• Quasi-Medium Energy Ion Scattering Spectroscopy Observation of a Ge δ-doped Layer Fabricated by Hydrogen Mediated Epitaxy
• プラズマ化学気相成長法による電界電子エミッター用ナノ構造薄膜の作製と評価
• Ultrasensitive Ozone Detection Using Single-Walled Carbon Nanotube Networks
• Direct Growth of Single-Walled Carbon Nanotube Networks on Alumina Substrate: A Novel Route to Ultrasensitive Gas Sensor Fabrication
• Naftopidil monotherapy vs naftopidil and an anticholinergic agent combined therapy for storage symptoms associated with benign prostatic hyperplasia : A prospective randomized controlled study
• Direct Observation of the Growth Process of Ag Thin Film on a Hydrogen-Terminated Si(111) Surface
• Low-Temperature Growth of Carbon Nanofiber by Thermal Chemical Vapor Deposition Using CuNi Catalyst
• Low-Temperature Synthesis of Aligned Carbon Nanofibers on Glass Substrates by Inductively Coupled Plasma Chemical Vapor Deposition
• Scattering Process of Low-Energy Ions from Binary Compound Surfaces at 180°
• IR Sensing of the Electronic Structure in the Mixed-Valence States of Iron Carbonyl-Attached Biferrocene and Terferrocene
• Selective Growth of Straight Carbon Nanotubes by Low-Pressure Thermal Chemical Vapor Deposition
• Synthesis of Metal-Alloy-Coated Nanowires toward Functional Scanning Probe Microscope
• Electrical Characterization of Metal-Coated Carbon Nanotube Tips
• Exploiting Metal Coating of Carbon Nanotubes for Scanning Tunneling Microscopy Probes
• Correlation between Field Electron Emission and Structural Properties in Randomly and Vertically Oriented Carbon Nanotube Films
• Local Etching of Insulator-Coated Carbon Nanotubes towards Passivated Nanoprobes
• Influence of Plasma State on the Structural Property of Vertically Oriented Carbon Nanotubes Grown by RF Plasma-Enhanced Chemical Vapor Deposition
• Method for Aligned Bamboolike Carbon Nanotube Growth Using RF Magnetron Sputtering
• Carbon Nanostructures Grown on Graphite Substrates without Catalyst by Pulsed Laser Deposition
• Growth of Single-Walled Carbon Nanotubes Rooted from Fe/Al Nanoparticle Array
• Electronic Transport in Multiwalled Carbon Nanotubes Contacted with Patterned Electrodes
• Insulator-Coated Carbon Nanotubes Synthesized by Pulsed Laser Deposition
• Fabrication and Characteristics of Amorphous Carbon Films Grown in Pure Methane Plasma by using Radio Frequency Plasma Enhanced Chemical Vapor Deposition
• Ultra-Low-Threshold Field Electron Emission from Pillar Array of Aligned Carbon Nanotube Bundles
• Direct Synthesis of Carbon Nanotubes on Ti-Coated Metal Substrates and Its Application to Electrochemical Double Layer Capacitors
• Low Temperature Synthesis of Aligned Carbon Nanotubes by Inductively Coupled Plasma Chemical Vapor Deposition Using Pure Methane
• Formation of Nanoscale Diamond Particles without Substrate Heating by Cathodic Arc Deposition
• Analysis of Pad Surface Roughness on Copper Chemical Mechanical Planarization
• Quantitative Analysis of Hydrogen-Induced Si Segregation on Ge-Covered Si(001) Surface
• Direct Growth of Single-Walled Carbon Nanotubes on W Tip Apex
• In situ Monitoring of Surface Processes in Plasma by Coaxial Impact-Collision Ion Scattering Spectroscopy
• Real-Time Scanning Tunneling Microscope Observations of High-Temperature Oxygen Reaction with the 6H-SiC(0001)$\sqrt{3}\times\sqrt{3}$ Surface
• Thermal Stability in the Morphology of Ge Films on Si(001) Grown by Hydrogen-Surfactant-Mediated Epitaxy
• Formation of Graphite Layers during Carbon Nanotubes Growth
• Submonolayer Er Phases on Si(111)
• Improvement in Field Emission Uniformity from Screen-Printed Double-Walled Carbon Nanotube Paste by Grinding
• Effect of Substrate Surface Phase on the Shape of Self-Organized Al Nanoclusters on Si(100) Formed upon Atomic Hydrogen Exposure
• Rare Earth Elements in Hydrothermally Altered Granitic Rocks in the Ranong and Takua Pa Tin-Field, Southern Thailand
• Total Cross Section of Electron Stimulated Desorption of Hydrogen from Hydrogen-Terminated Ge/Si(001) as Observed by Time of Flight Elastic Recoil Detection Analysis
• Effect of Substrate Surface Phase on the Shape of Self-Organized Al Nanoclusters on Si(100) Formed upon Atomic Hydrogen Exposure

もっと見る 閉じる

スポンサーリンク