In situ Monitoring of Surface Processes in Plasma by Coaxial Impact-Collision Ion Scattering Spectroscopy
スポンサーリンク
概要
- 論文の詳細を見る
We demonstrated in situ monitoring of surface processes in plasma, using coaxial impact-collision ion scattering spectroscopy (CAICISS) operable in a gas atmosphere, taking the plasma nitridation processes of Si surfaces with (111) and (001) faces as examples. From the results of real-time monitoring of CAICISS spectra, it was found that (1) the top layer of the Si(111) surface is readily nitrided even at room temperature, while the Si(001) surface requires thermal activation for its nitridation and that (2) at a high temperature, the nitridation of Si(001) proceeds to layers deeper than in the case of Si(111).
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-04-15
著者
-
Katayama Mitsuhiro
Department Of Electronic Engineering Graduate School Of Engineering Osaka University
-
FUJII Shunjiro
Department of Electronic Engineering, Graduate School of Engineering, Osaka University
-
MICHISHITA Yusuke
Department of Electronic Engineering, Graduate School of Engineering, Osaka University
-
Oura Kenjiro
Department Of Elecronic Engineering Graduate School Of Engineering Osaka University
-
Michishita Yusuke
Department of Electronic Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
-
Fujii Shunjiro
Department of Electronic Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
-
Katayama Mitsuhiro
Department of Elecronic Engineering, Graduate School of Engineering, Osaka University
関連論文
- Electrical Characterization of Metal-Coated Carbon Nanotube Tips
- Formation of Vertically Aligned Carbon Nanotubes by Dual-RF-Plasma Chemical Vapor Deposition : Surfaces, Interfaces, and Films
- Development of New Apparatus for Field Emission Measurement
- Formation of Graphite Layers during Carbon Nanotubes Growth
- Synthesis of Aligned Carbon Nanofibers at 200℃
- Scanning Tunneling Microscopy Study of the c(4X4) Structure Formation in the Sub-Monolayer Sb/Si(100) System : Surfaces, Interfaces, and Films
- Mg/Si(100) Reconstructions Studied by Scanning Tunneling Microscopy
- Composition and Surface Structure of Quantum Chains on a In/Si(111)Surface
- Atomic Hydrogen Interaction with the Si(100)4×3-In Surface Studied by Scanning Tunneling Microseopy
- Si(111)2×2-In ↔ Si(111)?×?-In Scanning Tunneling Microscope Tip-Induced Structural Transformation ( Scanning Tunneling Microscopy)
- Methodology for Accurate Oxygen Distribution Analysis and Its Application to YBa_2Cu_3O_x Thin Films Using ^O(α, α)^O 3.045 MeV Resonance Reaction
- Effects of Post-Annealing on Oxygen Content of Indium Tin Oxide Films Fabricated by Reactive Sputtering
- Depth Profiling of Oxygen Concentration of Indium Tin Oxide Films Fabricated by Reactive Sputtering
- Metal-Coated Carbon Nanotube Tip for Scanning Tunneling Microscope
- Effect of Substrate Surface Phase on the Shape of Self-Organized Al Nanoclusters on Si(100) Formed upon Atomic Hydrogen Exposure
- Single-Walled Carbon Nanotube Thin-Film Sensor for Ultrasensitive Gas Detection
- Thermal Stability in the Morphology of Ge Films on Si(001) Grown by Hydrogen-Surfactant-Mediated Epitaxy
- Influence of Hydrogen-Surfactant Coverage on Ge/Si(001) Heteroepitaxy : Surfaces, Interfaces, and Films
- Influence of Mn Incorporation on Molecular Beam Epitaxial Growth of GaMnN Film :Surfaces, Interfaces, and Films
- Hydrogen Segregation and Its Detrimental Effect in Epitaxial Growth of Ge Thin Film on Hydrogen-Terminated Si(001) Surface : Surfaces Interfaces, and Films
- Coaxial Impact-Collision Ion Scattering Spectroscopy and Time-of-Flight Elastic Recoil Detection Analysis for In Situ Monitoring of Surface Processes in Gas Phase Atmosphere : Surfaces, Interfaces, and Films
- Structural Analysis of 6H-SiC(0001)√ × √ Reconstructed Surface
- Silver-Induced 3 × 3 Phase on 6H-SiC(0001)√ × √ Surface
- Adsorption of Atomic Hydrogen on Ag-Covered 6H-SiC(0001) Surface
- Direct Observation of Strained Layer Formation at the Initial Stage of In Thin Film Growth on Si(100)
- Total Cross Section of Electron Stimulated Desorption of Hydrogen from Hydrogen-Terminated Ge/Si(001) as Observed by Time of Flight Elastic Recoil Detection Analysis
- Adsorption of H on the Ge/Si(001) Surface as Studied by Time-of-Flight Elastic Recoil Detection Analysis and Coaxial Impact Collision Ion Scattering Spectroscopy
- Adsorption of Atomic Eydrogen on the Si(100)-(2×1)-Sb Surface
- A New Apparatus for Impact Collision Ion Scattering Spectroscopy
- In situ Monitoring of Surface Processes in Plasma by Coaxial Impact-Collision Ion Scattering Spectroscopy
- Ion Channeling Study of Epitaxially Grown HoBa_2Cu_3O_x Thin Films on MgO(001)
- Hydrogen-Induced Ag Cluster Formation on the Si(111)√3×√3(R30°)-Ag Surface Observed by Scanning Tunneling Microscopy
- Scanning Tunneling Microscope Observation of Si(111)-3×1-Ag Structure
- Growth Processes of Si(111)-√×√-Ag Studied by Scanning Tunrueling Microscope
- Quasi-Medium Energy Ion Scattering Spectroscopy Observation of a Ge δ-doped Layer Fabricated by Hydrogen Mediated Epitaxy
- Ultrasensitive Ozone Detection Using Single-Walled Carbon Nanotube Networks
- Direct Growth of Single-Walled Carbon Nanotube Networks on Alumina Substrate: A Novel Route to Ultrasensitive Gas Sensor Fabrication
- Direct Observation of the Growth Process of Ag Thin Film on a Hydrogen-Terminated Si(111) Surface
- Low-Temperature Growth of Carbon Nanofiber by Thermal Chemical Vapor Deposition Using CuNi Catalyst
- Low-Temperature Synthesis of Aligned Carbon Nanofibers on Glass Substrates by Inductively Coupled Plasma Chemical Vapor Deposition
- Scattering Process of Low-Energy Ions from Binary Compound Surfaces at 180°
- Selective Growth of Straight Carbon Nanotubes by Low-Pressure Thermal Chemical Vapor Deposition
- Synthesis of Metal-Alloy-Coated Nanowires toward Functional Scanning Probe Microscope
- Electrical Characterization of Metal-Coated Carbon Nanotube Tips
- Exploiting Metal Coating of Carbon Nanotubes for Scanning Tunneling Microscopy Probes
- Correlation between Field Electron Emission and Structural Properties in Randomly and Vertically Oriented Carbon Nanotube Films
- Local Etching of Insulator-Coated Carbon Nanotubes towards Passivated Nanoprobes
- Influence of Plasma State on the Structural Property of Vertically Oriented Carbon Nanotubes Grown by RF Plasma-Enhanced Chemical Vapor Deposition
- Method for Aligned Bamboolike Carbon Nanotube Growth Using RF Magnetron Sputtering
- Carbon Nanostructures Grown on Graphite Substrates without Catalyst by Pulsed Laser Deposition
- Growth of Single-Walled Carbon Nanotubes Rooted from Fe/Al Nanoparticle Array
- Electronic Transport in Multiwalled Carbon Nanotubes Contacted with Patterned Electrodes
- Insulator-Coated Carbon Nanotubes Synthesized by Pulsed Laser Deposition
- Fabrication and Characteristics of Amorphous Carbon Films Grown in Pure Methane Plasma by using Radio Frequency Plasma Enhanced Chemical Vapor Deposition
- Ultra-Low-Threshold Field Electron Emission from Pillar Array of Aligned Carbon Nanotube Bundles
- Direct Synthesis of Carbon Nanotubes on Ti-Coated Metal Substrates and Its Application to Electrochemical Double Layer Capacitors
- Low Temperature Synthesis of Aligned Carbon Nanotubes by Inductively Coupled Plasma Chemical Vapor Deposition Using Pure Methane
- Formation of Nanoscale Diamond Particles without Substrate Heating by Cathodic Arc Deposition
- Quantitative Analysis of Hydrogen-Induced Si Segregation on Ge-Covered Si(001) Surface
- Direct Growth of Single-Walled Carbon Nanotubes on W Tip Apex
- In situ Monitoring of Surface Processes in Plasma by Coaxial Impact-Collision Ion Scattering Spectroscopy
- Real-Time Scanning Tunneling Microscope Observations of High-Temperature Oxygen Reaction with the 6H-SiC(0001)$\sqrt{3}\times\sqrt{3}$ Surface
- Thermal Stability in the Morphology of Ge Films on Si(001) Grown by Hydrogen-Surfactant-Mediated Epitaxy
- Formation of Graphite Layers during Carbon Nanotubes Growth
- Submonolayer Er Phases on Si(111)
- Improvement in Field Emission Uniformity from Screen-Printed Double-Walled Carbon Nanotube Paste by Grinding
- Effect of Substrate Surface Phase on the Shape of Self-Organized Al Nanoclusters on Si(100) Formed upon Atomic Hydrogen Exposure
- Total Cross Section of Electron Stimulated Desorption of Hydrogen from Hydrogen-Terminated Ge/Si(001) as Observed by Time of Flight Elastic Recoil Detection Analysis
- Effect of Substrate Surface Phase on the Shape of Self-Organized Al Nanoclusters on Si(100) Formed upon Atomic Hydrogen Exposure