Formation of Nanoscale Diamond Particles without Substrate Heating by Cathodic Arc Deposition
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概要
- 論文の詳細を見る
A carbon film grown at room temperature using a cathodic arc process in ambient gases such as N2 and He was investigated by Raman spectroscopy and scanning electron microscopy (SEM). Diamond particles were found to be formed at a constant total pressure of $10^{-2}$ Pa, while graphite-like carbon was grown at a lower pressure of around $10^{-3}$ Pa in the lower $P_{\text{(He)}}/P_{\text{(Total)}}$ region and tetrahedral amorphous carbon was grown at a higher pressure such as $10^{-1}$ Pa. The diamond particles were randomly distributed in the film and had sizes in the range of 50–200 nm.
- Japan Society of Applied Physicsの論文
- 2005-05-10
著者
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AOKI Katsunori
SONAC Incorporated
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SUZUKI Keisuke
SONAC Incorporated
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ISHII Kazuhisa
SONAC Incorporated
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TAKANASHI Kumiko
SONAC Incorporated
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KOMUKAI Takuji
SONAC Incorporated
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HIRAO Takashi
Kouchi University of Technology
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Oura Kenjiro
Department Of Elecronic Engineering Graduate School Of Engineering Osaka University
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Ishii Kazuhisa
SONAC Incorporated, 6-5-6 Sakyo, Nara 631-0801, Japan
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Aoki Katsunori
SONAC Incorporated, 6-5-6 Sakyo, Nara 631-0801, Japan
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Komukai Takuji
SONAC Incorporated, 6-5-6 Sakyo, Nara 631-0801, Japan
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Hirao Takashi
Kouchi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kami-gun, Kochi 782-8502, Japan
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Suzuki Keisuke
SONAC Incorporated, 6-5-6 Sakyo, Nara 631-0801, Japan
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