Effects of Post-Annealing on Oxygen Content of Indium Tin Oxide Films Fabricated by Reactive Sputtering

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-10-15

著者

• OURA Kenjiro

  Department of Electronic Engineering, Graduate School of Engineering, Osaka University

• Honda Shin‐ichi

  Osaka Univ. Osaka Jpn

• Oura K

  Research Center For Ultrahigh Voltage Electron Microscopy Osaka University

• Oura Kenjiro

  Department Of Electronic Engineering Faculty Of Engineering Osaka University

• HONDA Shinichi

  Department of Electric Engineering, Graduate School of Engineering, Osaka University

• Honda Shinichi

  Department Of Electronic Engineering Faculty Of Engineering Osaka University

• TSUJIMOTO Akira

  Department of Electronic Engineering, Faculty of Engineering, Osaka University

• WATAMORI Michio

  Department of Electronic Engineering, Faculty of Engineering, Osaka University

• Honda S

  Nihon Univ. Koriyama Jpn

• Oura Kenjiro

  Department Of Elecronic Engineering Graduate School Of Engineering Osaka University

• Tsujimoto A

  Department Of Electronic Engineering Faculty Of Engineering Osaka University

• Honda Shin-ichi

  Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U

• Watamori Michio

  Department Of Electronic Engineering Faculty Of Engineering Osaka University

• Honda Shini-ichi

  Department Of Electronic Engineering Graduate School Of Engineering Osaka University

関連論文

• Method for Aligned Bamboolike Carbon Nanotube Growth Using RF Magnetron Sputtering
• Highly Stable and Sensitive Gas Sensor Based on Single-Walled Carbon Nanotubes Protected by Metal-Oxide Coating Layer
• Density of States of Single-Walled Carbon Nanotubes Grown on Metal Tip Apex
• Scanning Tunneling Microscopy and Spectroscopy Study of a Steep Facet Surface on Ge Nanocrystal Grown on Si(111)
• Hydrogen Interaction with Single-Walled Carbon Nanotubes
• Highly Sensitive Detection of Carbon Monoxide at Room Temperature Using Platinum-Decorated Single-Walled Carbon Nanotubes
• Effect of Electrical Aging on Field Electron Emission from Screen-Printed Carbon Nanotube Film
• Low-Temperature Synthesis of Aligned Carbon Nanofibers on Glass Substrates by Inductively Coupled Plasma Chemical Vapor Deposition
• Scanning Tunneling Spectroscopy Study of the ZnO(0001)-Zn Surface
• Electrical Characterization of Metal-Coated Carbon Nanotube Tips
• Direct Growth of Single-Walled Carbon Nanotube Networks on Alumina Substrate : A Novel Route to Ultrasensitive Gas Sensor Fabrication
• Development of an Ultrasensitive Gas Sensor Based on Single-Walled Carbon Nanotubes
• Low-Temperature Growth of Carbon Nanofiber by Thermal Chemical Vapor Deposition Using CuNi Catalyst
• Density Control of Carbon Nanotubes through the Thickness of Fe/Al Multilayer Catalyst
• Formation of Nanoscale Diamond Particles without Substrate Heating by Cathodic Arc Deposition
• Correlation between Field Electron Emission and Structural Properties in Randomly and Vertically Oriented Carbon Nanotube Films
• Ultra-Low-Threshold Field Electron Emission from Pillar Array of Aligned Carbon Nanotube Bundles
• Formation of Vertically Aligned Carbon Nanotubes by Dual-RF-Plasma Chemical Vapor Deposition : Surfaces, Interfaces, and Films
• Development of New Apparatus for Field Emission Measurement
• Low Temperature Synthesis of Aligned Carbon Nanotubes by Inductively Coupled Plasma Chemical Vapor Deposition Using Pure Methane
• Fabrication and Characteristics of Amorphous Carbon Films Grown in Pure Methane Plasma by using Radio Frequency Plasma Enhanced Chemical Vapor Deposition
• Formation of Graphite Layers during Carbon Nanotubes Growth
• Direct Synthesis of Carbon Nanotubes on Ti-Coated Metal Substrates and Its -Application to Electrochemical Double Layer Capacitors
• Synthesis of Aligned Carbon Nanofibers at 200℃
• Submonolayer Er Phases on Si(111)
• Scanning Tunneling Microscopy Study of the c(4X4) Structure Formation in the Sub-Monolayer Sb/Si(100) System : Surfaces, Interfaces, and Films
• Mg/Si(100) Reconstructions Studied by Scanning Tunneling Microscopy
• Composition and Surface Structure of Quantum Chains on a In/Si(111)Surface
• Atomic Hydrogen Interaction with the Si(100)4×3-In Surface Studied by Scanning Tunneling Microseopy
• Si(111)2×2-In ↔ Si(111)?×?-In Scanning Tunneling Microscope Tip-Induced Structural Transformation ( Scanning Tunneling Microscopy)
• Methodology for Accurate Oxygen Distribution Analysis and Its Application to YBa_2Cu_3O_x Thin Films Using ^O(α, α)^O 3.045 MeV Resonance Reaction
• Effects of Post-Annealing on Oxygen Content of Indium Tin Oxide Films Fabricated by Reactive Sputtering
• Depth Profiling of Oxygen Concentration of Indium Tin Oxide Films Fabricated by Reactive Sputtering
• Metal-coated Carbon Nanotube Tips for Nanoscale Electrical Measurements
• Exploiting Metal Coating of Carbon Nanotubes for Scanning Tunneling Microscopy Probes
• Metal-Coated Carbon Nanotube Tip for Scanning Tunneling Microscope
• Effect of Substrate Surface Phase on the Shape of Self-Organized Al Nanoclusters on Si(100) Formed upon Atomic Hydrogen Exposure
• Single-Walled Carbon Nanotube Thin-Film Sensor for Ultrasensitive Gas Detection
• Growth of Single-Walled Carbon Nanotubes Rooted from Fe/Al Nanoparticle Array
• Electronic Transport in Multiwalled Carbon Nanotubes Contacted with Patterned Electrodes
• Local Etching of Insulator-Coated Carbon Nanotubes towards Passivated Nanoprobes
• Insulator-Coated Carbon Nanotubes Synthesized by Pulsed Laser Deposition
• Selective Growth of Straight Carbon Nanotubes by Low-Pressure Thermal Chemical Vapor Deposition
• Thermal Stability in the Morphology of Ge Films on Si(001) Grown by Hydrogen-Surfactant-Mediated Epitaxy
• Influence of Hydrogen-Surfactant Coverage on Ge/Si(001) Heteroepitaxy : Surfaces, Interfaces, and Films
• Influence of Mn Incorporation on Molecular Beam Epitaxial Growth of GaMnN Film :Surfaces, Interfaces, and Films
• Hydrogen Segregation and Its Detrimental Effect in Epitaxial Growth of Ge Thin Film on Hydrogen-Terminated Si(001) Surface : Surfaces Interfaces, and Films
• Coaxial Impact-Collision Ion Scattering Spectroscopy and Time-of-Flight Elastic Recoil Detection Analysis for In Situ Monitoring of Surface Processes in Gas Phase Atmosphere : Surfaces, Interfaces, and Films
• Structural Analysis of 6H-SiC(0001)√ × √ Reconstructed Surface
• Silver-Induced 3 × 3 Phase on 6H-SiC(0001)√ × √ Surface
• Adsorption of Atomic Hydrogen on Ag-Covered 6H-SiC(0001) Surface
• Direct Observation of Strained Layer Formation at the Initial Stage of In Thin Film Growth on Si(100)
• Total Cross Section of Electron Stimulated Desorption of Hydrogen from Hydrogen-Terminated Ge/Si(001) as Observed by Time of Flight Elastic Recoil Detection Analysis
• Adsorption of H on the Ge/Si(001) Surface as Studied by Time-of-Flight Elastic Recoil Detection Analysis and Coaxial Impact Collision Ion Scattering Spectroscopy
• Adsorption of Atomic Eydrogen on the Si(100)-(2×1)-Sb Surface
• Influence of Plasma State on the Structural Property of Vertically Oriented Carbon Nanotubes Grown by RF Plasma-Enhanced Chemical Vapor Deposition
• Structure Analysis of ZrB_2(0001) Surface Prepared by ex situ HF Treatment
• A New Apparatus for Impact Collision Ion Scattering Spectroscopy
• In situ Monitoring of Surface Processes in Plasma by Coaxial Impact-Collision Ion Scattering Spectroscopy
• Ion Channeling Study of Epitaxially Grown HoBa_2Cu_3O_x Thin Films on MgO(001)
• Hydrogen-Induced Ag Cluster Formation on the Si(111)√3×√3(R30°)-Ag Surface Observed by Scanning Tunneling Microscopy
• Scanning Tunneling Microscope Observation of Si(111)-3×1-Ag Structure
• Growth Processes of Si(111)-√×√-Ag Studied by Scanning Tunrueling Microscope
• Effect of Annealing on Interface Structure and Giant Magnetoresistance Oscillation in Co/Cu Multilayers
• Quasi-Medium Energy Ion Scattering Spectroscopy Observation of a Ge δ-doped Layer Fabricated by Hydrogen Mediated Epitaxy
• Flux Reversal and Calculations of Hysteresis Loops in CoCr Sputtered Films
• Wall Energy and Exchange Stiffness in CoCr Films Sputtered on Low Temperature Substrates
• Direct Observation of the Growth Process of Ag Thin Film on a Hydrogen-Terminated Si(111) Surface
• Low-Temperature Growth of Carbon Nanofiber by Thermal Chemical Vapor Deposition Using CuNi Catalyst
• Low-Temperature Synthesis of Aligned Carbon Nanofibers on Glass Substrates by Inductively Coupled Plasma Chemical Vapor Deposition
• Scattering Process of Low-Energy Ions from Binary Compound Surfaces at 180°
• Ion Channeling Study of SrTiO_3 Substrates and As-Deposited YBa_2Cu_3O_x Thin Films
• Selective Growth of Straight Carbon Nanotubes by Low-Pressure Thermal Chemical Vapor Deposition
• STIMULATION OF CATECHOLAMINE RELEASE FROM ISOLATED ADRENAL GLANDS BY SOME AMINO ACIDS
• COMPARATIVE STUDIES OF HEPATIC NICOTINE METABOLIZING ENZYME ACTIVITIES IN MONKEYS AND DOGS
• Exploiting Metal Coating of Carbon Nanotubes for Scanning Tunneling Microscopy Probes
• Correlation between Field Electron Emission and Structural Properties in Randomly and Vertically Oriented Carbon Nanotube Films
• Local Etching of Insulator-Coated Carbon Nanotubes towards Passivated Nanoprobes
• Influence of Plasma State on the Structural Property of Vertically Oriented Carbon Nanotubes Grown by RF Plasma-Enhanced Chemical Vapor Deposition
• Method for Aligned Bamboolike Carbon Nanotube Growth Using RF Magnetron Sputtering
• POTENT INHIBITORY ACTION OF PILOCARPINE ON HEPATIC DRUG METABOLISM
• Carbon Nanostructures Grown on Graphite Substrates without Catalyst by Pulsed Laser Deposition
• Growth of Single-Walled Carbon Nanotubes Rooted from Fe/Al Nanoparticle Array
• Electronic Transport in Multiwalled Carbon Nanotubes Contacted with Patterned Electrodes
• Insulator-Coated Carbon Nanotubes Synthesized by Pulsed Laser Deposition
• Fabrication and Characteristics of Amorphous Carbon Films Grown in Pure Methane Plasma by using Radio Frequency Plasma Enhanced Chemical Vapor Deposition
• Ultra-Low-Threshold Field Electron Emission from Pillar Array of Aligned Carbon Nanotube Bundles
• Direct Synthesis of Carbon Nanotubes on Ti-Coated Metal Substrates and Its Application to Electrochemical Double Layer Capacitors
• Low Temperature Synthesis of Aligned Carbon Nanotubes by Inductively Coupled Plasma Chemical Vapor Deposition Using Pure Methane
• Formation of Nanoscale Diamond Particles without Substrate Heating by Cathodic Arc Deposition
• Quantitative Analysis of Hydrogen-Induced Si Segregation on Ge-Covered Si(001) Surface
• In situ Monitoring of Surface Processes in Plasma by Coaxial Impact-Collision Ion Scattering Spectroscopy
• EFFECT OF THEOPHYLLINE AND 3', 5'-CYCLIC ADENOSINE MONOPHOSPHATE ON THE SALIVARY AMYLASE SECRETION FROM RABBIT PAROTID GLAND
• The anti-inflammatory effects of phenolic dental medicaments as determined by mouse ear edema assay.
• Inhibition of Lipoxygenase by Phenolic compounds.
• Stimulation-evoked cyclic nucleotides efflux from isolated perfused dog adrenals and possible involvement of calcium.
• Changes in Convulsion Susceptibility of Lidocaine by Alteration of Brain Catecholaminergic Functions.
• Involvement of Brain Serotonergic Function in Lidocaine-Induced Convulsions in Mice.
• EFFECT OF CHLORPROMAZINE ON ENZYMIC REACTIONS INVOLVING METAL IONS
• EFFECT OF SEROTONIN, GLUCAGON AND OTHER HORMONES ON AMYLASE SECRETION FROM RABBIT PAROTID GLAND

もっと見る 閉じる

スポンサーリンク