Formation of Nanofibers on the Surface of Diamond-Like Carbon Films by RF Oxygen Plasma Etching
スポンサーリンク
概要
- 論文の詳細を見る
Diamond-like carbon (DLC) nanosize fibers were formed by etching DLC films using RF O<sub>2</sub> plasma. The DLC films were grown on silicon substrates by an RF plasma chemical vapor deposition (CVD) method, and a small amount of Ni was deposited on the DLC films using a DC magnetron sputtering method before the etching. DLC fibers of 20 nm diameter and 600 nm height were found on the etched surfaces of the DLC films. DLC fibers of similar size that were highly insulating were also obtained by O<sub>2</sub> etching without the deposition of Ni. It was found that Al from the RF electrode was sputtered and contaminated the DLC surface during etching, which would have affected the formation of fibers. The anisotropic etching of DLC and the ion-induced growth of carbon fibers are discussed as the formation mechanisms of the DLC fibers. The DLC fibers bent and stuck together during a field-emission scanning electron microscope observation, especially in the slow scanning mode. Such soft fibers can exist vertically and straightly throughout the etching in RF plasma.
- 2011-08-25
著者
-
古田 寛
高知工科大学
-
Furuta Hiroshi
Department Of Earth And Space Science Osaka University
-
Hatta Akimitsu
Department Of Electrical Engineering Osaka University:(present Address)department Of Electronic And
-
Furuta H
Research Institute For Nanodevices Kochi University Of Technology
-
Hatta Akimitsu
Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, Kami, Kochi 782-8502, Japan
-
Furuta Hiroshi
Research Institute, Kochi University of Technology, Kami, Kochi 782-8502, Japan
-
Harigai Tooru
Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, Kami, Kochi 782-8502, Japan
-
Koji Hirofumi
Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, Kami, Kochi 782-8502, Japan
関連論文
- カーボンナノチューブの合成と電界電子放出ランプ(FEL)への応用
- カーボンナノチューブ量産技術開発と電界電子放出素子への応用
- 基板バイアスにより制御されたZnO薄膜の結晶性とドライエッチングにより形成される側壁形状との相関
- 選択エッチング法によるナノサイズ炭素エミッタ形成
- 非耐熱性基板用低温絶縁膜技術の開発 (特集 産学官協力の場--高知工科大学)
- カーボンナノチューブ材料と応用 (特集 産学官協力の場--高知工科大学)
- ZnO-TFTの開発と液晶ディスプレイへの応用 (特集 産学官協力の場--高知工科大学)
- ダイヤモンドへの内部電極の形成とそれを用いた電子放出素子 : エミッタ電極のセルフアライン加工
- ダイヤモンドナノエミッタの開発
- ダイヤモンドの高度な反応性イオンエッチング
- 単結晶ダイヤモンドの電子デバイス応用のための微細突起加工
- 尖鋭突起加工したダイヤモンド電子エミッタの開発
- 先端材料応用技術 ダイヤモンドナノエミッターの作製とその応用
- Intense Green Cathodoluminescence from Low-Temperature-Deposited ZnO Film with Fluted Hexagonal Cone Nanostructures
- Density Control of Carbon Nanotubes through the Thickness of Fe/Al Multilayer Catalyst
- Formation of Vertically Aligned Carbon Nanotubes by Dual-RF-Plasma Chemical Vapor Deposition : Surfaces, Interfaces, and Films
- Characterization of Surface Conductive Diamond Layer Grown by Microwave Plasma Chemical Vapor Deposition
- Electrical Properties of Boron-Implanted Homoepitaxial Diamond Films
- Comparative Study on Chemical Vapor Deposition of Diamond-Like Carbon Films from Methane and Acetylene Using RF Plasma
- Comparison of Properties of Diamond Nanowhiskers Obtained by Etching Diamond Films with Different Metal Coatings in Radio Frequency Plasma
- Characterization of Homoepitaxial Diamond Films Grown from Carbon Monoxide
- カーボンナノチューブパターン化エミッタと電子放出デバイス応用 (電子ディスプレイ)
- Self-Organized Pattern Formation in Porous Silicon Using a Lattice Model with Quantum Confinement Effect
- Initial Stage of Bias-Enhanced Diamond Nucleation Induced by Microwave Plasma
- Structural Study of Chemical-Vapor-Deposited Diamond Surface by High-Resolution Electron Microscopy
- Improvement in Visible Luminescence Properties of Anodized Porous Silicon by Indium Plating
- Elastic Recoil Detection Analysis for Hydrogen near the Surface of Chemical-Vapor-Deposited Diamond
- Electron Affinity of Single-Crystalline Chemical-Vapor-Deposited Diamond Studied by Ultraviolet Synchrotron Radiation
- Observations of the Initial Stage of Chemical-Vapor-Deposited Diamond Growth Using Transmission Electron Microscopy
- Effect of Ambient on the Surface Resistance of Diamond Films during Cooling after Deposition
- Fabrication of Diamond Films at Low Pressure and Low-Temperature by Magneto-Active Microwave Plasma Chermical Vapor Deposition ( Plasma Processing)
- Effect of Ion Trapping Films on the Electrooptic Characteristics of Polymer-Stabilized Ferroelectric Liquid Crystal Display Exhibiting V-Shaped Switching
- Influence of the Surface Alignment Conditions and the Polymer Stabilization on the Electrooptic Characteristics of Ferroelectric Liquid Crystal Displays Exhibiting Half-V Switching : A Comparison of Photoalignment and Rubbing Technique : Structure and Mec
- Nitrogen Doping Effects on Electrical Properties of Diamond Films
- Thermal Stability of Electron Field Emission from Polycrystalline Diamond Film(Special Issue on Field Electron Emission from Carbon Materials)
- Degradation of Photoluminescence and Electron Paramagnetic Defects in Naturally Oxidized or Oxygen-Implanted Porous Silicon with Electron Spin Resonance Imaging
- Low Temperature Fabrication of Diamond Films with Nanocrystal Seeding
- Ground Electric Field Effects on Rats and Sparrows : Seismic Anomalous Animal Behaviors (SAABs)
- Estimation of Frequency Accuracy and Stability in a Diode Laser-Pumped Rubidium Beam Atomic Clock Using a Novel Microwave Resonant Method
- Crystal Structure Analysis of Multiwalled Carbon Nanotube Forests by Newly Developed Cross-Sectional X-ray Diffraction Measurement
- Effect of Pulsed Substrate Bias on Film Properties of SiO2 Deposited by Inductively Coupled Plasma Chemical Vapor Deposition
- Luminescent Characteristics of Plasma-Oxidized Porous Silicon
- Visible Photoluminescence from Anodically Oxidized Porous Silicon
- 低温形成表示デバイス向け絶縁膜の新規対向電極CVD法による形成(発光型/非発光型ディスプレイ合同研究会)
- カーボンナノチューブパターン化エミッタと電子放出デバイス応用(発光型/非発光型ディスプレイ合同研究会)
- Effect of Oxygen Component in Magneto-Active Microwave CH_4/He Plasma on Large-Area Diamond Nucleation over Si
- Highly Efficient Electron Emission Diode of Single-Crystalline Chemical-Vapor-Deposition Diamond
- Performance of Electron Cycrotron Resonance Plasma Produced by a New Microwave Launching System in a Multicusp Magnetic Field with Permanent Magnets
- Formation of Nanofibers on the Surface of Diamond-Like Carbon Films by RF Oxygen Plasma Etching
- カーボンナノチューブパターン化エミッタと電子放出デバイス応用
- 低温形成表示デバイス向け絶縁膜の新規対向電極CVD法による形成
- Low-Temperature Growth of Carbon Nanofiber by Thermal Chemical Vapor Deposition Using CuNi Catalyst
- 低温形成表示デバイス向け絶縁膜の新規対向電極CVD法による形成(発光型/非発光型ディスプレイ,テーマ:ディスプレイに関する技術全般:LCD(バックライトを含む),PDP,有機/無機EL,CRT,FED,VFD,LEDなどのディスプレイに関するデバイス,部品,材料及び応用技術)
- Diffusion Coefficients in 4-component Mixture Expressed Explicitly in Terms of Binary Diffusion Coefficients and Mole Fractions
- XRDを用いたカーボンナノチューブ構造体の結晶構造解析法(LSIを含む電子デバイスの評価・解析・診断,及び信頼性一般)
- 低温形成表示デバイス向け絶縁膜の新規対向電極CVD法による形成
- カーボンナノチューブパターン化エミッタと電子放出デバイス応用
- SiO2 Insulator Film Synthesized at 100 °C Using Tetramethylsilane by Inductively Coupled Plasma Chemical Vapor Deposition
- 表面ボイドのミー散乱 : 小惑星の反射スペクトル
- Pulsed Microplasma Using Carbon Nanotubes for Cathode
- Correlation between Field Electron Emission and Structural Properties in Randomly and Vertically Oriented Carbon Nanotube Films
- Low Temperature Synthesis of Aligned Carbon Nanotubes by Inductively Coupled Plasma Chemical Vapor Deposition Using Pure Methane
- Influence of Thermal Annealing on Microstructures of Zinc Oxide Films Deposited by RF Magnetron Sputtering
- Effect of Energetic Particle Bombardment on Microstructure of Zinc Oxide Films Deposited by RF Magnetron Sputtering