Effect of Ambient on the Surface Resistance of Diamond Films during Cooling after Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-12-01
著者
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MORI Yusuke
Department of Engineering, Osaka University
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EIMORI Nobuhiro
Department of Electrical Engineering, Faculty of Engineering, Osaka University
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HATTA Akimitsu
Department of Electrical Engineering, Faculty of Engineering, Osaka University
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ITO Toshimichi
Department of Electrical Engineering, Faculty of Engineering, Osaka University
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HIRAKI Akio
Department of Electrical Engineering, Faculty of Engineering, Osaka University
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Mori Y
Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni
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Mori Yoshihiro
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corp.
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Hiraki Akio
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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Ito Toshimichi
Department Of Electrical Engineering Faculty Of Engineering Osaka University:cooperative Research Ce
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Ito Toshimichi
Department Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka
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Ito Toshimichi
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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Hatta Akimitsu
Department Of Electrical Engineering Osaka University:(present Address)department Of Electronic And
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Eimori Nobuhiro
Department Of Electrical Engineering Osaka University
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Mori Yusuke
Department Of Applied Chemistry School Of Science And Engineering Waseda University
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Mori Y
Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U
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