Epitaxial Growth of AlN Thin Films on Sapphire by Pulsed Laser Deposition and Effect of N_2 Ambient on Crystallinity

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-04-15

著者

• MORI Yusuke

  Department of Engineering, Osaka University

• SASAKI Takatomo

  Department of Engineering, Osaka University

• Murata Yuya

  Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U

• Mori Y

  Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni

• Mori Yusuke

  Department Of Electrical Engineering Osaka University

• Okamoto M

  Osaka Univ. Osaka Jpn

• Sasaki T

  Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni

• Sasaki Takatomo

  Department Of Electrical Engineering Faculty Of Engineering Osaka University:cooperative Research Ce

• Sasaki Takatomo

  Department Of Electrical Engineering Faculty Of Engineering Osaka University

• Okamoto M

  Department Of Electrical Engineering Osaka University

• OKAMOTO Mitsuo

  Department of Electrical Engineering, Osaka University

• Mori Yusuke

  Department Of Applied Chemistry School Of Science And Engineering Waseda University

• Sasaki Takatomo

  Department Of Electrical Engineering And Computer Science Nagoya University

• Mori Y

  Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U

• Sasaki Takatomo

  Department Of Electrical Electronic And Information Engineering Osaka University

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