Effect of RF Plasma Etching on Surface Damage in CsLiB_6O_<10> Crystal
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-02-15
著者
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Yoshida K
Department Of Chemistry Graduate School Of Science Osaka University
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Yamaguchi K
Osaka Univ. Osaka
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吉田 起國
京大原子エネルギー研
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YOSHIDA Kunio
Department of Mechanical Sciences and Engineering, Tokyo Institute of Technology
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KAMIMURA Tomosumi
Department of Electronics, Information and Communication Engineering, Osaka Institute of Technology
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YOSHIMURA Masashi
Department of Engineering, Osaka University
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MORI Yusuke
Department of Engineering, Osaka University
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SASAKI Takatomo
Department of Engineering, Osaka University
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吉村 昌弘
東工大・工材研
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YOSHIDA Kunio
Osaka Institute of Technology
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Yoshida Kunio
Department Of Electronics Information And Communication Engineering Osaka Institute Of Technology
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Mori Y
Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni
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Mori Yusuke
Department Of Electrical Engineering Osaka University
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Sasaki T
Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni
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Yoshida K
Osaka Institute Of Technology
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Sasaki Takatomo
Department Of Electrical Engineering Faculty Of Engineering Osaka University:cooperative Research Ce
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Sasaki Takatomo
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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Yoshimura Masashi
Department Of Applied Biological Chemistry The University Of Tokyo
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Kamimura Tomozumi
Department Of Electronics Information And Communication Engineering Osaka Institute Of Technology
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吉村 昌弘
Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni
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Konishi Yusuke
Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni
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Kamimura T
Department Of Electronics Information And Communication Engineering Osaka Institute Of Technology
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Konishi Yusuke
Department Of Mechanical Sciences And Engineering Tokyo Institute Of Technology
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Mori Yusuke
Department Of Applied Chemistry School Of Science And Engineering Waseda University
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Yoshida Kunio
Department Of Chemical Engineering University Of Tokyo
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Sasaki Takatomo
Department Of Electrical Engineering And Computer Science Nagoya University
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Mori Y
Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U
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Sasaki Takatomo
Department Of Electrical Electronic And Information Engineering Osaka University
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Kamimura Tomosumi
Department of Electronics Information and Communication Engineering, Osaka Institute of Technology, 5-16-1 Omiya Asahiku, Osaka, Osaka 535-8585, Japan
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