High-Temperature Synthesis of Amorphous Carbon Nitride Thin Films with Modified Microstructure
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概要
- 論文の詳細を見る
Carbon nitride (CN) thin films were synthesized by RF plasma-pulsed laser deposition (PLD) technique at 600℃. Nitrogen incorporation of CN films was observed to increase significantly with the increase of negative d.c. self bias voltage. Fourier transform infrared (FTIR) spectra of these films were found to resolve into two distinguishable absorption bands centered at 1550cm^<-1> and 1200cm^<-1> in contrast to a single broad absorption band usually reported. With a coupled interpretation of X-ray photoelectron spectroscopy (XPS), FTIR and Raman spectroscopies, these films appeared to consist of tetrahedral N-sp^3 C and trigonal N-sp^2 C binding states with suppressed graphite-like CN microstructure.
- 社団法人応用物理学会の論文
- 1998-06-15
著者
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AOYAMA Toshihiro
Department of Electronic and Informarion Engineering, Suzuka National College of Technology
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Mori Y
Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni
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Mori Yusuke
Department Of Electrical Engineering Osaka University
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Sasaki T
Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni
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Yap Yoke
Department Of Electrical Engineering Osaka University
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Sasaki Takatomo
Department Of Electrical Engineering Faculty Of Engineering Osaka University:cooperative Research Ce
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Sasaki Takatomo
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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Yokota Y
The Research Center For Microanalysis Okayama University Of Science
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Yokota Y
Department Of Electrical Engineering Osaka University
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KIDA Shinjiro
Department of Electrical Engineering, Osaka University
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Mori Yusuke
Department Of Applied Chemistry School Of Science And Engineering Waseda University
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Kida Shinjiro
Department Of Electrical Engineering Osaka University
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Sasaki Takatomo
Department Of Electrical Engineering And Computer Science Nagoya University
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Mori Y
Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U
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Aoyama Toshihiro
Department Of Electrical Engineering Osaka University
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Sasaki Takatomo
Department Of Electrical Electronic And Information Engineering Osaka University
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