Synthesis of GaN Crystal Using Gallium Hydride
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概要
- 論文の詳細を見る
A new method for synthesizing a large area of $c$-axis GaN film was developed. The gallium hydride which was formed by the reaction between metal-Ga and hydrogen gas was used as the Ga source, and reacted with NH3 gas to grow GaN crystals on the sapphire (0001) substrate. 2.7 μm-thick GaN film with $c$-axis orientation could be grown on the substrate. Stable conditions for the synthesis of gallium hydride by the reaction of H2 gas with metal-Ga were examined. As a result, gallium hydride is stable at about 1000°C which is a temperature commonly used for the growth of GaN. These results show that the use of gallium hydride as the predominant species of the Ga source can provide a relatively inexpensive method of growing GaN crystals at a high level of purity.
- Japan Society of Applied Physicsの論文
- 2005-01-10
著者
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Yoshimura Masashi
Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni
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吉村 昌弘
東工大・工材研
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Mori Yusuke
Graduate School of Engineering, Osaka University
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Sasaki T
Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni
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KAWAMURA Fumio
Graduate School of Pharmaceutical Sciences, Nagoya City University
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Sasaki Takatomo
Graduate School Of Engineering Osaka University
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吉村 昌弘
Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni
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YOSHIMURA Masashi
Graduate School of Engineering, Osaka University
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Kawamura Fumio
Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U
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Imade Mamoru
Graduate school of Electrical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, J
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Yoshimura Masashi
Graduate School Of Engineering Osaka University
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Mori Yusuke
Graduate School Of Engineering Osaka University
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Mori Yusuke
Graduate School Of Bionics Tokyo University Of Technology
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Imade Mamoru
Graduate School Of Electrical Engineering Osaka University
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YOSHIMURA Masashi
Graduate school of Electrical Engineering, Osaka University
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SASAKI Takatomo
Graduate school of Electrical Engineering, Osaka University
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