Synthesis of Low-Resistivity Aluminum Nitride Films Using Pulsed Laser Deposition
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2003-03-01
著者
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YOSHIMURA Masashi
Department of Engineering, Osaka University
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MORI Yusuke
Department of Engineering, Osaka University
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SASAKI Takatomo
Department of Engineering, Osaka University
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Mori Yusuke
Graduate School of Engineering, Osaka University
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Sasaki Takatomo
Graduate School Of Engineering Osaka University
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Sasaki Takatomo
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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Mori Y
Department Of Electrical Engineering Osaka University
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Yoshimura Masashi
Department Of Applied Biological Chemistry The University Of Tokyo
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KAI Yasunori
Department of Electrical Engineering, Faculty of Engineering, Osaka University
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YOSHIMURA Masashi
Graduate School of Engineering, Osaka University
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Mori Yusuke
Graduate School Of Engineering Osaka University
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Kai Yasunori
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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Mori Yusuke
Department Of Applied Chemistry School Of Science And Engineering Waseda University
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Sasaki Takatomo
Department Of Electrical Engineering And Computer Science Nagoya University
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Sasaki Takatomo
Department Of Electrical Electronic And Information Engineering Osaka University
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