Ni-Silicide Formation : Dependence on Crystallographic Orientation of Si Substrates

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-07-15

著者

• 中村 裕之

  Graduate School Of Material Science University Of Hyogo

• Hirai M

  Osaka Univ. Osaka Jpn

• Hirai M

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• Nakamura H

  Institute For Protein Research Osaka University

• Yap Yoke

  Department Of Electrical Engineering Osaka University

• Kusaka M

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• Hirai Masaaki

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• YOKOTA Yasuhiro

  The Research Center for Microanalysis, Okayama University of Science

• IWAMI Motohiro

  Research Laboratory for Surface Science, Faculty of Science, Okayama University

• KUSAKA Masahiko

  Research Laboratory for Surface Science, Faculty of Science, Okayama University

• WATABE Hirokuni

  Matsushita Research Institute Inc.

• NAKAMURA Hatsuo

  Osaka Electro-Communication University

• Yamauchi Shoichi

  Research Laboratory for Surface Science, Faculty of Science, Okayama University

• AKIYAMA Akitsugu

  Central Research Laboratories, Kuraray Co., Ltd.

• Kawai M

  Surface Chemistry Laboratory

• Yokota Y

  The Research Center For Microanalysis Okayama University Of Science

• Iwami Motohiro

  Reseach Laboratory For Surface Science Faculty Of Science Okayama University

• Iwami M

  Department Of Physics Faculty Of Science Hiroshima University

• Watabe Hirokuni

  Matsushita Electric Industrial Co. Ltd.

• Kusaka Masahiko

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• Hirai Masamitsu

  Department Of Applied Physics Faculty Of Engineering Tohoku University

• Yokota Y

  Department Of Electrical Engineering Osaka University

• Iwami M

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• Yokota Yasuhiro

  The Research Center For Microanalysis Okayama University Of Science

• Akiyama Akitsugu

  Central Research Laboratories Kuraray Co. Ltd.

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