Study on Ti/C-teminated 4H- and 6H-SiC interface reactions by soft X-ray emission spectroscopy (SXES)
スポンサーリンク
概要
- 論文の詳細を見る
- 2001-03-20
著者
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Hirai M
Osaka Univ. Osaka Jpn
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Hirai M
Research Laboratory For Surface Science Faculty Of Science Okayama University
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Kusaka M
Research Laboratory For Surface Science Faculty Of Science Okayama University
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Hirai Masaaki
Research Laboratory For Surface Science Faculty Of Science Okayama University
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IWAMI Motohiro
Research Laboratory for Surface Science, Faculty of Science, Okayama University
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KUSAKA Masahiko
Research Laboratory for Surface Science, Faculty of Science, Okayama University
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LABIS Joselito
Research Laboratory for Surface Science, Faculty of Science, Okayama University
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OHI Akihiko
Research Laboratory for Surface Science, Faculty of Science, Okayama University
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FUJIKI Toshinori
Research Laboratory for Surface Science, Faculty of Science, Okayama University
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TODA Tadao
Microelectronics Research Center, Sanyo Co. Ltd.
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HARIMA Hiroshi
Faculty of Engineering, Osaka University
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Kawai M
Surface Chemistry Laboratory
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Toda Tadao
Microelectronics Research Center Sanyo Co. Ltd.
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Ohi Akihiko
Research Laboratory For Surface Science Faculty Of Science Okayama University
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Labis Joselito
Research Laboratory For Surface Science Faculty Of Science Okayama University
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Iwami Motohiro
Reseach Laboratory For Surface Science Faculty Of Science Okayama University
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Iwami M
Department Of Physics Faculty Of Science Hiroshima University
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Kusaka Masahiko
Research Laboratory For Surface Science Faculty Of Science Okayama University
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Hirai Masamitsu
Department Of Applied Physics Faculty Of Engineering Tohoku University
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Iwami M
Research Laboratory For Surface Science Faculty Of Science Okayama University
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Harima Hiroshi
Faculty Of Engineering Osaka University
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Harima Hiroshi
Faculty Of Engineering And Design Kyoto Institute Of Technology
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Fujiki Toshinori
Research Laboratory For Surface Science Faculty Of Science Okayama University
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