Transmission Electron Microscopic Study of the Surface and Interface of Carbonized-Layer/Si(100)

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概要

• 論文の詳細を見る

• A heterojunction of carbonized-layer/Si(100) was studied by means of a transmission electron microscope (TEM). The surface layer was clarified to be well aligned to substrate Si(100) by a crosssectional TEM observation. Small misorientation was observed at the bottom of the carbonized layer. Either the surface or the interface of the overlayer had a rough structure with a thickness of a few nm. A plane-view observation revealed the existence of fine grains in the grown layer with a size of ≲ 10 nm, which rotated a little with respect to the substrate Si(100) and each other.

• 社団法人応用物理学会の論文
• 1989-02-20

著者

• MATSUNAMI Hiroyuki

  Department of Electronic Science & Engineering, Kyoto University

• Yap Yoke

  Department Of Electrical Engineering Osaka University

• Kusaka M

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• Hirai Masaaki

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• YOKOTA Yasuhiro

  The Research Center for Microanalysis, Okayama University of Science

• IWAMI Motohiro

  Research Laboratory for Surface Science, Faculty of Science, Okayama University

• KUSAKA Masahiko

  Research Laboratory for Surface Science, Faculty of Science, Okayama University

• Kawai M

  Surface Chemistry Laboratory

• Yokota Y

  The Research Center For Microanalysis Okayama University Of Science

• Iwami Motohiro

  Reseach Laboratory For Surface Science Faculty Of Science Okayama University

• Iwami M

  Department Of Physics Faculty Of Science Hiroshima University

• Kusaka Masahiko

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• Matsunami Hiroyuki

  Department Of Electrical Engineering Kyoto University

• Yokota Y

  Department Of Electrical Engineering Osaka University

• Iwami M

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• Yokota Yasuhiro

  The Research Center For Microanalysis Okayama University Of Science

• Matsunami Hiroyuki

  Department Of Eectrical Engineering Kyoto University

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