A Reproducible LPE Growth of High-Quality In_<1-x>Ga_xP_<1-y>As_y Layers on GaAs by the Control of Phosphorus Vapor on the Substrate
スポンサーリンク
概要
- 論文の詳細を見る
Lattice-matched LPE growth of In_<1-x>Ga_xP_<1-y>As_y Layers on GaAs was carried out using a conventional slider boat system. High-quality epitaxial layers with smooth mirror surfaces were reproducibly obtained by the control of the diffusion of P vapor from the melt to the substrate and the reaction with the substrate at high temperatures before the growth. A very thin surface layer on the substrate which is formed by the reaction with P vapor seems to improve the affinity between the melt and the substrate as well as to relax internal stresses of the epitaxial layer caused by the lattice mismatch.
- 社団法人応用物理学会の論文
- 1982-06-20
著者
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SUZUKI AKIRA
Department of Hospital Pharmacy
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MURAKAMI Takashi
Department of Clinical Sciences and Laboratory Medicine, Kansai Medical University
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MATSUNAMI Hiroyuki
Department of Electronic Science & Engineering, Kyoto University
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Murakami Takashi
Department Of Cardiology Okayama University School Of Medicine
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Kuriyama Yoichi
Department Of Electronics Faculty Of Engineering Kyoto University
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Matsunami Hiroyuki
Department Of Electronics Faculty Of Engineering Kyoto University
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Matsunami Hiroyuki
Department Of Electrical Engineering Kyoto University
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Matsunami Hiroyuki
Department Of Eectrical Engineering Kyoto University
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Suzuki Akira
Department Of Anesthesiology And Intensive Care Hamamatsu University School Of Medicine
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Suzuki Akira
Department Of Electronics Faculty Of Engineering Kyoto University:(present Address) Central Research
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