Effects of Deposition Conditions on Properties of a-Si_<1-x>C_x:H Diagnosed Using Optical Emission Spectroscopy

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1986-10-20

著者

• Aizawa Kouichi

  Department Of Integrated Biosciences Graduate School Of Frontier Sciences The University Of Tokyo:sa

• Aizawa Kouichi

  Department Of Electrical Engineering Kyoto University

• MATSUNAMI Hiroyuki

  Department of Electronic Science & Engineering, Kyoto University

• FUYUKI Takashi

  Department of Electrical Engineering, Kyoto University

• Fuyuki Takashi

  Department Of Electronic Science And Engineering Faculty Of Engineering Kyoto University

• YOSHIMOTO Masahiro

  Department of Electrical Engineering, Kyoto University

• Yoshimoto Masahiro

  Department Of Electrical Engineering Kyoto University

• Yoshimoto M

  Materials And Structures Laboratory Tokyo Institute Of Technology

• Fuyuki T

  Nara Inst. Sci. And Technol. Nara Jpn

• Fuyuki Takashi

  Department Of Eectrical Engineering Kyoto University

• Matsunami Hiroyuki

  Department Of Electrical Engineering Kyoto University

• Matsunami Hiroyuki

  Department Of Eectrical Engineering Kyoto University

• Fujii Tadashi

  the Graduate School of Materials Science, Nara Institute of Science and Technology

関連論文

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