Correspondence between Surface Morphological Faults and Crystallographic Defects in 4H-SiC Homoepitaxial Film

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-11-15

著者

• KIMOTO Tsunenobu

  Department of Electronic Science and Engineering, Kyoto University

• INOKO Fukuji

  The University of Tokushima

• OKADA Tatsuya

  Department of Mechanical Engineering, Faculty of Engineering, The University of Tokushima

• Matsunami H

  Kyoto Univ. Kyoto Jpn

• NODA Hiroshi

  Department of Legal Medicine, Kinki University School of Medicine

• MATSUNAMI Hiroyuki

  Department of Electronic Science & Engineering, Kyoto University

• Inoko F

  The University Of Tokushima

• Inoko Fukuji

  Department Of Mechanical Engineering Tokushima University

• Okada T

  Department Of Mechanical Engineering Faculty Of Engineering The University Of Tokushima

• Okada Tatsuya

  Department Of Mathematics School Of Medicine Fukushima Medical University

• Kimoto T

  Kyoto Univ. Kyoto Jpn

• Inoko Fukuji

  Detartment Of Mechanical Engineering Tokushima University

• EBISUI Takahiro

  Department of Mechanical Engineering, Tokushima University

• Ebisui Takahiro

  Department Of Mechanical Engineering Tokushima University

• Okada Tatsuya

  Department Of Mechanical Engineering Tokushima University

• Inoko Fukuji

  Department Of Mechanical Engineering Faculty Of Engineering Tokushima University

• Kimoto Tsunenobu

  Department Of Electrical Engineering Faculty Of Engineering Kyoto University

• Noda Hiroshi

  Department Of Animal Health Faculty Of Veterinary Medicine Rakuno Gakuen University

• Matsunami Hiroyuki

  Department Of Electrical Engineering Kyoto University

• Matsunami H

  Department Of Electronic Science And Engineering Kyoto University

• Noda Hiroshi

  Department Of Hospital Pharmacy School Of Medicine University Of Occupational And Environmental Heal

• Matsunami Hiroyuki

  Department Of Eectrical Engineering Kyoto University

• Inoko F

  Department of Mechanical Engineering, Faculty of Engineering, Tokushima University

• Matsunami Hiroyuki

  Department of Electronic Science and Engineering, Kyoto University

• Ebisui T

  Department of Mechanical Engineering, Tokushima University

関連論文

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