Homoepitaxial Chemical Vapor Deposition of 6H-SiC at Low Temperatures on {011^^-4} Substrates

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-11-15

著者

• KIMOTO Tsunenobu

  Department of Electronic Science and Engineering, Kyoto University

• Yamashita Atsushi

  Department of Pathology, Faculty of Medicine, University of Miyazaki

• Matsunami H

  Kyoto Univ. Kyoto Jpn

• MATSUNAMI Hiroyuki

  Department of Electronic Science & Engineering, Kyoto University

• Yoo W

  Wafermasters Inc. Ca Usa

• Kimoto T

  Kyoto Univ. Kyoto Jpn

• Yamashita A

  Tokai Univ. Hiratsuka Jpn

• YOO Woo

  Department of Electrical Engineering, Kyoto University

• Yoo Woo

  Wafer Masters Inc.

• Yoo Woo

  Department Of Electrical Engineering Kyoto University

• Kimoto Tsunenobu

  Department Of Electrical Engineering Faculty Of Engineering Kyoto University

• Matsunami Hiroyuki

  Department Of Electrical Engineering Kyoto University

• Yamashita A

  Ntt Interdisciplinary Research Laboratories

• Yamashita Atsushi

  Department Of Agricultural Chemistry Tottori University

• Matsunami Hiroyuki

  Department Of Eectrical Engineering Kyoto University

• Yoo Woo

  Wafer Masters, Inc.

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