Defect Formation in (0001)- and (1120)-Oriented 4H-SiC Crystals P^+-Implanted at Room Temperature

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-10-15

著者

• KIMOTO Tsunenobu

  Department of Electronic Science and Engineering, Kyoto University

• OKADA Tatsuya

  Department of Mechanical Engineering, Faculty of Engineering, The University of Tokushima

• Tanaka Naoki

  Department of Gastroenterology, Shinshu University School of Medicine

• Matsunami H

  Kyoto Univ. Kyoto Jpn

• MATSUNAMI Hiroyuki

  Department of Electronic Science & Engineering, Kyoto University

• Tanaka N

  Department Of Applied Biological Sciences Faculty Of Agriculture Saga University

• Okada T

  Department Of Mechanical Engineering Faculty Of Engineering The University Of Tokushima

• Okada Tatsuya

  Department Of Mathematics School Of Medicine Fukushima Medical University

• Kimoto T

  Kyoto Univ. Kyoto Jpn

• OKAMOTO Kouichi

  Department of Neurology, Gunma University School of Medicine

• Okada Tatsuya

  Department Of Mechanical Engineering Tokushima University

• NEGORO Yuki

  Department of Electronic Science and Engineering, Kyoto University

• KUJIME Noriyuki

  Department of Mechanical Engineering, Tokushima University

• Kimoto Tsunenobu

  Department Of Electrical Engineering Faculty Of Engineering Kyoto University

• Kujime Noriyuki

  Department Of Mechanical Engineering Tokushima University

• Matsunami Hiroyuki

  Department Of Electrical Engineering Kyoto University

• Okamoto K

  Department Of Advanced Materials Science And Engineering Faculty Of Engineering Yamaguchi University

• Matsunami H

  Department Of Electronic Science And Engineering Kyoto University

• Negoro Yuki

  Department Of Electronic Science And Engineering Kyoto University

• Okamoto Kouichi

  Department Of Applied Physics Waseda University

• Okamoto Kouichi

  Department Of Mechanical Engineering Tokushima University

• Tanaka Naoki

  Department Of Bio-molecular Engineering Kyoto Institute Of Technology

• Matsunami Hiroyuki

  Department Of Eectrical Engineering Kyoto University

• Kujime N

  Department of Mechanical Engineering, Tokushima University, Tokushima 770-8506, Japan

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