Electrical Properties of Silicon Nitride Films Prepared by Photo-Assisted Chemical Vapor Deposition under Controlled Decomposition of Ammonia

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概要

• 論文の詳細を見る
• 1993-12-30

著者

• MATSUNAMI Hiroyuki

  Department of Electronic Science & Engineering, Kyoto University

• YOSHIMOTO Masahiro

  Department of Electrical Engineering, Kyoto University

• Yoshimoto Masahiro

  Department Of Electrical Engineering Kyoto University

• OHTSUKI Tetsuya

  Department of Electrical Engineering, Kyoto University

• TAKUBO Kenji

  Department of Electrical Engineering, Kyoto University

• KOMODA Michio

  Department of Electrical Engineering, Kyoto University

• Ohtsuki Tetsuya

  Department Of Electrical Engineering Kyoto University

• Matsunami Hiroyuki

  Department Of Electrical Engineering Kyoto University

• Takubo Kenji

  Department Of Electrical Engineering Kyoto University

• Komoda Michio

  Department Of Electrical Engineering Kyoto University

• Takubo Kenji

  Department Of Digestive Surgery Matsue Red Cross Hospital

• Matsunami Hiroyuki

  Department Of Eectrical Engineering Kyoto University

• OHTSUKI Tetsuya

  Department of Chemistry and Materials Technology, Kyoto Institute of Technology

• MATSUNAMI Hiroyuki

  Department of Electrical Engineering, Kyoto University

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