Analysis of Nanostructure Formation Using Photon/Electron Spectroscopies: Cu on SiC Substrates
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概要
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Auger electron spectroscopy (AES) and low-energy electron diffraction (LEED) studies of Cu deposition on a 6H-SiC(0001) surface have shown fine-particle formation with an average size of approximately 2 nm for a 6H-SiC(0001) C-face at a nominal Cu coverage of approximately 2 ML, where its size depends on the nominal Cu film thickness. Soft-X-ray emission spectroscopy (SXES) of an annealed Cu(60 nm)/3C-SiC(001) specimen clarified that little reaction occurred at the Cu/SiC interface. The heated specimen is considered to have Cu islands on top.
- 2001-03-30
著者
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Hirai Masaaki
Research Laboratory For Surface Science Faculty Of Science Okayama University
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SAITOH Taeko
Research Laboratory for Surface Science, Faculty of Science, Okayama University
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An Zhenlian
Research Laboratory For Surface Science Faculty Of Science Okayama University
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Iwami Motohiro
Reseach Laboratory For Surface Science Faculty Of Science Okayama University
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Kusaka Masahiko
Research Laboratory For Surface Science Faculty Of Science Okayama University
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Saitoh Taeko
Research Laboratory for Surface Science, Faculty of Science, Okayama University, Okayama 700-8530, Japan
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