Construction of a Soft X-Ray Emission Spectroscopy (SXES) Apparatus and Its Application for Study of Electronic and Atomic Structures of a Multilayer System

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概要

• 論文の詳細を見る

• A soft X-ray emission spectroscopy (SXES) apparatus was constructed using a grating monochromator. The resolution was sufficient to show differences in valence electronic structures of Si compounds including pure Si crystal. A nondestructive analysis of a Ni/Si(111) specimen with heat treatment was carried out using either a clear difference in Si L_<2,3> SXES spectra of Ni silicide and Si single crystals or the fact that the soft X-ray production depth increases in a solid with increasing energy of a primary electron, E_p. The electronic and atomic structures of the surface and interface of specimens adopted were clarified with E_p varying between 1.5 and 10 keV.

• 社団法人応用物理学会の論文
• 1990-07-20

著者

• 中村 裕之

  Graduate School Of Material Science University Of Hyogo

• Nakamura H

  Institute For Protein Research Osaka University

• Kusaka M

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• Hirai Masaaki

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• IWAMI Motohiro

  Research Laboratory for Surface Science, Faculty of Science, Okayama University

• KUSAKA Masahiko

  Research Laboratory for Surface Science, Faculty of Science, Okayama University

• WATABE Hirokuni

  Matsushita Research Institute Inc.

• NAKAMURA Hatsuo

  Osaka Electro-Communication University

• KAWAI Masao

  Shimazu Co.

• SOEZIMA Hiroyoshi

  Shimazu Co.

• Kawai M

  Surface Chemistry Laboratory

• Iwami Motohiro

  Reseach Laboratory For Surface Science Faculty Of Science Okayama University

• Iwami M

  Department Of Physics Faculty Of Science Hiroshima University

• Watabe Hirokuni

  Matsushita Electric Industrial Co. Ltd.

• Kusaka Masahiko

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• Iwami M

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• KUBOTA Masaru

  Research Laboratory for Surface Science, Faculty of Science, Okayama University

• YAMAMOTO Sekika

  Research Laboratory for Surface Science, Faculty of Science, Okayama University

• Soezima H

  Shimazu Co.

• Yamamoto Sekika

  Research Laboratory For Surface Science Faculty Of Science Okayama University

• Kubota Masaru

  Research Laboratory For Surface Science Faculty Of Science Okayama University

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