Performance of Electron Cycrotron Resonance Plasma Produced by a New Microwave Launching System in a Multicusp Magnetic Field with Permanent Magnets
スポンサーリンク
概要
- 論文の詳細を見る
A multi-ring-cusp-type surface magnetic field is tested for production of large-diameter electron cyclotron resonance (ECR) plasma. The density and its distribution are improved by means of a new launching system consisting of an adjustable antenna and a microwave suppressor inserted into the vacuum chamber, which forces the microwave to propagate into the plasma from the stronger side of the surface magnetic fields.
- 社団法人応用物理学会の論文
- 1992-05-15
著者
-
HATTA Akimitsu
Department of Electrical Engineering, Faculty of Engineering, Osaka University
-
KUBO Makoto
Department of Cardiovascular Medicine, Yamaguchi University Graduate School of Medicine
-
ITATANI Ryohei
Department of Electronics, Kyoto University
-
Yasaka Yasuyoshi
Department of Electronic Science and Engineering, Kyoto University
-
Itatani Ryohei
Department Of Electronics Kyoto University
-
Hatta Akimitsu
Department Of Electrical Engineering Osaka University:(present Address)department Of Electronic And
-
Hatta Akimitsu
Department Of Electronics Kyoto University:(present Address) Department Of Electrical Engineering Fa
-
Kubo Makoto
Department Of Electronics Kyoto University
-
Itatani Ryohei
Department Of Electonics Kyoto University
-
Yasaka Yasuyoshi
Department Of Electronics Kyoto University
-
Yasaka Yasuyoshi
Department Of Electonics Kyoto University
関連論文
- Characterization of Surface Conductive Diamond Layer Grown by Microwave Plasma Chemical Vapor Deposition
- Electrical Properties of Boron-Implanted Homoepitaxial Diamond Films
- Comparative Study on Chemical Vapor Deposition of Diamond-Like Carbon Films from Methane and Acetylene Using RF Plasma
- Comparison of Properties of Diamond Nanowhiskers Obtained by Etching Diamond Films with Different Metal Coatings in Radio Frequency Plasma
- Characterization of Homoepitaxial Diamond Films Grown from Carbon Monoxide
- Different Effects of Amlodipine and Enalapril on the Mitogen-Activated Protein Kinase/Extracellular Signal-Regulated Kinase Kinase-Extracellular Signal-Regulated Kinase Pathway for Induction of Vascular Smooth Muscle Cell Differentiation In Vivo
- Angiotensin II Type 1 Receptor Antagonist and Angiotensin-Converting Enzyme Inhibitor Altered the Activation of Cu/Zn-Containing Superoxide Dismutase in the Heart of Stroke-Prone Spontaneously Hypertensive Rats
- Calcium Antagonist Reduces Oxidative Stress by Upregulating Cu/Zn Superoxide Dismutase in Stroke-Prone Spontaneously Hypertensive Rats
- Effects of Angiotensin II Type 1 Receptor Antagonist on Smooth Muscle Cell Phenotype in Intramyocardial Arteries from Spontaneously Hypertensive Rats
- An Explanation of the Suppression of Instabilities by the Beam Modulation
- Suppression of Instabilities in a Beam-Plasma System by a Modulation of the Electron Beam
- Dependences of Amplitudes of Electron Waves and Growth Rates of Ion-Acoustic Waves on Boundary Conditions in a Beam-Plasma System
- Initial Stage of Bias-Enhanced Diamond Nucleation Induced by Microwave Plasma
- Structural Study of Chemical-Vapor-Deposited Diamond Surface by High-Resolution Electron Microscopy
- Improvement in Visible Luminescence Properties of Anodized Porous Silicon by Indium Plating
- Elastic Recoil Detection Analysis for Hydrogen near the Surface of Chemical-Vapor-Deposited Diamond
- Electron Affinity of Single-Crystalline Chemical-Vapor-Deposited Diamond Studied by Ultraviolet Synchrotron Radiation
- Observations of the Initial Stage of Chemical-Vapor-Deposited Diamond Growth Using Transmission Electron Microscopy
- Effect of Ambient on the Surface Resistance of Diamond Films during Cooling after Deposition
- Plasma Production and Wave Propagation in a Plasma Source Using Lower Hybrid Waves
- A Plasma Source Using Waves in a Lower Hybrid Frequency Range
- Fabrication of Diamond Films at Low Pressure and Low-Temperature by Magneto-Active Microwave Plasma Chermical Vapor Deposition ( Plasma Processing)
- Fundamental study on localized heating in hyperthermia using phase control of long-wavelength microwaves (特集 電気関係学会関西支部連合大会)
- Near-Field Distribution of Radial Line Slot Antenna for Surface-Wave-Coupled Plasma Generation
- Production of Large-Diameter Uniform Plasma in mTorr Range Using Microwave Discharge
- Nitrogen Doping Effects on Electrical Properties of Diamond Films
- Thermal Stability of Electron Field Emission from Polycrystalline Diamond Film(Special Issue on Field Electron Emission from Carbon Materials)
- Aplasia Cutis Congenita and Skull Defects after Exposure to Methimazole in Utero
- Basic Experimental Simulation of aTraveling Wave DirectEnergy Converter for a D-^3He Fusion Reactor
- Low Temperature Fabrication of Diamond Films with Nanocrystal Seeding
- Simulation of Plasma Production and Chemical Reaction in an Oxide Deposition Apparatus Using Electron Cyclotron Resonance Plasma
- Luminescent Characteristics of Plasma-Oxidized Porous Silicon
- Visible Photoluminescence from Anodically Oxidized Porous Silicon
- Destruction of Magnetic Surfaces near a Separatrix of a Stellarator Attributed to Perturbations of Magnetic Fields
- Effect of Oxygen Component in Magneto-Active Microwave CH_4/He Plasma on Large-Area Diamond Nucleation over Si
- Highly Efficient Electron Emission Diode of Single-Crystalline Chemical-Vapor-Deposition Diamond
- Computer Simulation of RF-Confinement of Plasmas in an Open-Ended Toroidal Quadrupole
- High Order Spline Interpolations in the Particle Simulation
- Competition of Weakly Collisional and Neighboring Wave Effects for the Destruction of Amplitude Oscillations
- Anomalous Effect of Small Collisions on the Nonlinear Interaction in a Small Cold Beam and a Warm Plasma System
- The Properties of Collision in the Plasma Composed of the Finite-Sized Particles of 2-Species
- The Effect of Oxygen on the Delay Time of Flashover by a Laser-Produced Plasma
- Positional Instabilities in a Tokamak with a Resistive Shell
- Positional Instabilities in a Shell-Less Tokamak
- Performance of Electron Cycrotron Resonance Plasma Produced by a New Microwave Launching System in a Multicusp Magnetic Field with Permanent Magnets
- Formation of Nanofibers on the Surface of Diamond-Like Carbon Films by RF Oxygen Plasma Etching
- A Probe for Measurements of Negative and Positive Ions in a Plasma
- The Control of Luminous Color of the Discharge Lamps
- High-Beta Operation with Enhanced Axial and Radial Confinement in the HIEI Tandem Mirror
- Excitation of Flute-Type Negative-Energy Ion-Cyclotron Waves due to Ion Gradient-B Drifts in High-β Mirror-Comfined Plasmas
- Propagation of Drift Waves in a Cylindrical Plasma
- Deformation of the Electron Beam Distribution Function and Suppression of Electron Waves
- Collisional Diffusion in a Toroidal Pinch
- Spatial Damping of Ion Acoustic Waves at a Turbulent State
- Hedgehog signaling pathway mediates the progression of non-invasive breast cancer to invasive breast cancer
- Effects of Radial Transport on Potential Formation and Mode Transition in a Tandem Mirror
- Pulsed Microplasma Using Carbon Nanotubes for Cathode
- Role of Helicon Waves on High-Density Plasma Production
- Semi-quantitative evaluation of CD44^+/CD24^- tumor cell distribution in breast cancer tissue using a newly developed fluorescence immunohistochemical staining method
- A Plasma Source Using Waves in a Lower Hybrid Frequency Range
- Simulation of Plasma Production and Chemical Reaction in an Oxide Deposition Apparatus Using Electron Cyclotron Resonance Plasma
- Near-Field Distribution of Radial Line Slot Antenna for Surface-Wave-Coupled Plasma Generation
- Spatial Structure of Waves and Plasma Uniformity in Planar Microwave Discharges
- Experimental and Simulation Studies of Gas Phase Reaction in Planar Microwave Plasma
- Correlations between Apparent Diffusion Coefficient Values and Prognostic Factors of Breast Cancer
- Study on the state of implementation of HER2 testing and positive ratios in patients with breast cancer in the Kyushu-Okinawa region of Japan