Simulation of Plasma Production and Chemical Reaction in an Oxide Deposition Apparatus Using Electron Cyclotron Resonance Plasma
スポンサーリンク
概要
- 論文の詳細を見る
A two-dimensional fluid simulation code is developed which can predict plasma properties and chemical species transport in gas phase in a realistic configuration of a production-line apparatus. The code is applied to an electron cyclotron resonance plasma reactor for oxide deposition on 20-cm wafers. The predicted density in Ar plasma is in good agreement with the experimental result. Two-dimensional distributions of radical densities in plasmas with gas mixtures of Ar/O2/SiH4 and Ar/O2/SiF4 are obtained, which are in accordance with the measured deposition rates of SiO2 and SiOxFy, respectively.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-30
著者
-
石井 信雄
東京エレクトロン
-
Amano Hideaki
Sagami Plant Tokyo Electron Tohoku Limited
-
Morimoto Tamotsu
Corporate R & D Central Research Laboratory Tokyo Electron Lmited
-
Tozawa Masaki
Sagami Plant Tokyo Electron Tohoku Limited
-
Yasaka Yasuyoshi
Department Of Electonics Kyoto University
-
Akahori Takashi
Sagami Plant Tokyo Electron Tohoku Limited
-
Ishii Nobuo
Corporate R & D Central Research Laboratory Tokyo Electron Lmited
-
Amano Hideaki
Sagami Plant, Tokyo Electron Tohoku Limited, Shiroyama-machi, Tsukui-gun, Kanagawa 220-01, Japan
-
Ishii Nobuo
Corporate R&D Central Research Laboratory, Tokyo Electron Ltd. 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japan
-
Ishii Nobuo
Corporate R&D Central Research Laboratory, Tokyo Electron Limited, Hosaka-cho, Nirasaki 407-01, Japan
-
Akahori Takashi
Sagami Plant, Tokyo Electron Tohoku Limited, Shiroyama-machi, Tsukui-gun, Kanagawa 220-01, Japan
-
Tozawa Masaki
Sagami Plant, Tokyo Electron Tohoku Limited, Shiroyama-machi, Tsukui-gun, Kanagawa 220-01, Japan
関連論文
- B-1-100 大口径均一プラズマ生成用表面波励振形式ラジアルラインスロットアンテナの電磁界分布
- 反応性ガスプラズマのパラメータ測定
- ECR C_4F_8プラズマにおけるCFxラジカル絶対密度の空間分布の計測とその分布形成機構
- CFxラジカル絶対密度のIRLAS空間分布測定
- ラジアルラインスロットアンテナを用いた大口径均一プラズマの生成
- ラジアルラインスロットアンテナを用いたプラズマエッチング装置
- Temperature-Measurement System Using Optical Fiber-Type Low-Coherence Interferometry for MultiLayered Substrate
- Plasma Production and Wave Propagation in a Plasma Source Using Lower Hybrid Waves
- Fundamental study on localized heating in hyperthermia using phase control of long-wavelength microwaves (特集 電気関係学会関西支部連合大会)
- Production of Large-Diameter Uniform Plasma in mTorr Range Using Microwave Discharge
- Basic Experimental Simulation of aTraveling Wave DirectEnergy Converter for a D-^3He Fusion Reactor
- Simulation of Plasma Production and Chemical Reaction in an Oxide Deposition Apparatus Using Electron Cyclotron Resonance Plasma
- Performance of Electron Cycrotron Resonance Plasma Produced by a New Microwave Launching System in a Multicusp Magnetic Field with Permanent Magnets
- High-Beta Operation with Enhanced Axial and Radial Confinement in the HIEI Tandem Mirror
- Spatial Damping of Ion Acoustic Waves at a Turbulent State
- Effects of Radial Transport on Potential Formation and Mode Transition in a Tandem Mirror
- Role of Helicon Waves on High-Density Plasma Production
- Production of Low-Electron-Temperature Electron Cyclotron Resonance Plasma Using Nitrogen Gas in the Mirror Magnetic Field
- A Plasma Source Using Waves in a Lower Hybrid Frequency Range
- Simulation of Plasma Production and Chemical Reaction in an Oxide Deposition Apparatus Using Electron Cyclotron Resonance Plasma
- Near-Field Distribution of Radial Line Slot Antenna for Surface-Wave-Coupled Plasma Generation
- Spatial Structure of Waves and Plasma Uniformity in Planar Microwave Discharges
- Experimental and Simulation Studies of Gas Phase Reaction in Planar Microwave Plasma