Spatial Structure of Waves and Plasma Uniformity in Planar Microwave Discharges
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概要
- 論文の詳細を見る
The spatial structure of waves and plasma uniformity in microwave discharges using a multi-slotted planar antenna are investigated experimentally and by calculation. The wave field amplitude and phase are measured in the axial and azimuthal directions, and are compared with three-dimensional finite-difference time-domain calculation result. The wave mode in the plasma does not change with various densities, and, as a consequence, spatially uniform plasmas are obtained for a wide range of parameters being free from abrupt changes associated with surface wave eigenmodes.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-10-30
著者
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Sugimoto Naoki
Department Of Cardiology Kanazawa Municipal Hospital
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Hojo Hitoshi
Plasma Research Center University Of Tsukuba
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Takeno Hiromasa
Department Of Electrical And Electronic Engineering Kobe University
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Yasaka Yasuyoshi
Department Of Electonics Kyoto University
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Takeno Hiromasa
Department of Electrical and Electronics Engineering, Kobe University, Kobe 657-8501, Japan
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Sakae Atsushi
Department of Electrical and Electronics Engineering, Kobe University, Kobe 657-8501, Japan
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Yasaka Yasuyoshi
Department of Electrical and Electronics Engineering, Kobe University, Kobe 657-8501, Japan
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Hojo Hitoshi
Plasma Research Center, University of Tsukuba, Tsukuba, Ibaraki 305-8577, Japan
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Sugimoto Naoki
Department of Electrical and Electronics Engineering, Kobe University, Kobe 657-8501, Japan
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