Production of Large-Diameter Uniform Plasma in mTorr Range Using Microwave Discharge
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-07-30
著者
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YAMAMOTO Tetsuya
Department of Neurosurgery, Graduate School of Comprehensive Human Sciences, University of Tsukuba
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石井 信雄
東京エレクトロン
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ANDO Makoto
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology
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Ishii N
Central Research Laboratory Tokyo Electron Ltd.
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Ishii Nobuo
Corporate R&d Central Research Laboratory Tokyo Electron Ltd.
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GOTO Naohisa
Department of Electronics and Systems, Faculty of Engineering, Takushoku University
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Morimoto Tamotsu
Corporate R & D Central Research Laboratory Tokyo Electron Lmited
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Yamamoto T
Department Of Electrical And Electronic Engineering Faculty Of Engineering Yamagata University
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Yasaka Yasuyoshi
Department of Electronic Science and Engineering, Kyoto University
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Goto N
Radial Antenna Laboratory
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Koga K
Department Of Electronics Graduate School Of Information Science And Electrical Engineering Kyushu U
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Nozaki Daiki
Department of Electronic Science and Engineering, Kyoto University
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Koga Kazuya
Department of Electronic Science and Engineering, Kyoto University
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Koga Kazuya
Department Of Electronic Science And Engineering Kyoto University
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Nozaki Daiki
Department Of Electronic Science And Engineering Kyoto University
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Yamamoto Tetsuya
Department Of Chemical Engineering Graduate School Of Engineering Hiroshima University
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Ando Makoto
Department Of Cardiovascular Surgery The Sakakibara Heart Institute
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Ando Makoto
Department Of Cardiovascular Surgery Sakakibara Heart Institute
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Yasaka Y
Department Of Electronic Science And Engineering Kyoto University
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Yasaka Yasuyoshi
Department Of Electronic Science And Engineering Kyoto University
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Yasaka Yasuyoshi
Department Of Electonics Kyoto University
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Ando Makoto
Department Of Applied Physics Faculty Of Engineering Tokyo University Of Agriculture And Technology
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Yamamoto Tetsuya
Department Of Astronomy School Of Science The University Of Tokyo
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Ishii Nobuo
Corporate R & D Central Research Laboratory Tokyo Electron Lmited
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Ishii Nobuo
Corporate R&D Central Research Laboratory, Tokyo Electron Ltd. 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japan
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Ishii Nobuo
Corporate R&D Central Research Laboratory, Tokyo Electron Limited, Hosaka-cho, Nirasaki 407-01, Japan
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