Design of 1m^2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis(Antennas and Propagation)
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概要
- 論文の詳細を見る
The authors have proposed a 1m^2 single-layer slotted waveguide array consisting of conducting baffles and quartz glass strips positioned in front of the slot aperture, which is referred to as a vacuum window, for microwave plasma excitation. The effect of the complicated outer vacuum window hinders the realization of uniform distribution. In this paper, a unit-cell of the alternating-phase fed single-layer slotted waveguide array with the vacuum window is analyzed by generalized scattering matrix method (GSM)-method of moments (MoM) hybridization analysis, and the array is designed to realize uniform aperture electromagnetic field distribution, where the plasma and the chamber is neglected. The GSM-MoM analysis gives reliable numerical results while the MoM has numerical errors due to singularities of Green's function for a long cavity. Uniform aperture EM field distribution outside of the vacuum window is observed in near field measurements using a 1/5 scale model antenna, and the validity of the analysis and design is verified.
- 社団法人電子情報通信学会の論文
- 2006-05-01
著者
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HIROKAWA Jiro
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology
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ANDO Makoto
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology
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Sasaki Atsushi
Department Of Applied Pharmacology Graduate School Of Medicine And Pharmaceutical Sciences Universit
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AZUMA Kazufumi
Advanced LCD Technology Development Center Co., Ltd.
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Ide Tetsuya
Advanced Lcd Technologies Development Center Co. Ltd.
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SASAKI Atsushi
Advanced Compound Semiconductors R&D Center, ROHM Co. Ltd.
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HIRANO Takuichi
Department of International Development Engineering, Tokyo Institute of Technology
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Hirano Takuichi
Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology
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SAKURAI Kimio
Tokyo Institute of Technology
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Sakurai K
Tokyo Institute Of Technology
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Sakakibara K
Department Of Electrical And Electronic Engineering Faculty Of Engineering Tokyo Institute Of Techno
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Ando M
Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology
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Ando Makoto
The Authors Are With The Department Of Electrical And Electronic Engineering Tokyo Institute Of Tech
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Hirokawa Jiro
Department Of Electrical & Electronic Engineering Faculty Of Engineering Tokyo Institute Of Tech
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Azuma Kazufumi
Advanced Lcd Technologies Development Center Co. Ltd.
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SAKURAI Kimio
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology
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NAKATA Yukihiko
Advanced LCD Technologies Development Center Co. Ltd.
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Hirano T
Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology
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Ando M
Tokyo Institute Of Technology
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Ando Makoto
Department Of Cardiovascular Surgery The Sakakibara Heart Institute
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Sasaki Atsushi
Department Of Applied Pharmacology Graduate School Of Medicine And Pharmaceutical Sciences Universit
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Sasaki A
Advanced Lcd Technologies Development Center Co. Ltd.
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Ando Makoto
Department Of Cardiovascular Surgery Sakakibara Heart Institute
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Sakurai Kimio
Dept. Of Electrical And Electronic Eng. Graduate School Of Science And Engineering Tokyo Institute O
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Ando Makoto
Department Of Applied Physics Faculty Of Engineering Tokyo University Of Agriculture And Technology
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Sasaki Atsushi
Advanced Compound Semiconductors R&d Center Rohm Co. Ltd.
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