Azuma Kazufumi | Advanced Lcd Technologies Development Center Co. Ltd.

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概要

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著作論文

Characterization of High-Performance Polycrystalline Silicon Complementary Metal-Oxide-Semiconductor Circuits
Design of 1m^2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis(Antennas and Propagation)
Irradiation Damage in SiO2/Si System Induced by Photons and/or Ions in Photo-Oxidation and Plasma-Oxidation
Novel Optical Method for Widening Process Window of Phase-Modulated Excimer Laser Crystallization
Ultralong Silicon Grains Grown by Excimer Laser Crystallization
Surface Wave Plasma Oxidation at Low Temperature under Rare Gas Dilution
Ultrahigh-Performance Polycrystalline Silicon Thin-Film Transistors on Excimer-Laser-Processed Pseudo-Single-Crystal Films
Characterization of Novel Polycrystalline Silicon Thin-Film Transistors with Long and Narrow Grains
Proposed Phase-Modulator Check System for Phase-Modulated Excimer-Laser Annealing
Pseudo-Single-Nucleus Lateral Crystallization of Si Thin Films
New Widening Method of Depth of Focus for Phase-Modulated Excimer-Laser Crystallization

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