Proposed Phase-Modulator Check System for Phase-Modulated Excimer-Laser Annealing
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概要
- 論文の詳細を見る
The fluctuation of the light intensity distribution on a sample surface has an adverse effect in lateral Si crystallization methods, such as phase-modulated excimer-laser annealing (PMELA). Consequently, the origins of various fluctuations must be examined precisely and suppressed satisfactorily and independently. In particular, the phase modulator, which mainly determines the microscopic light intensity distribution, must be checked carefully. We have developed a stand-alone visible-light check system for phase modulators, by taking different wavelength effects into account, and have confirmed the usefulness of the system.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-03-30
著者
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Taniguchi Yukio
Advanced Lcd Technologies Development Center Co. Ltd. (altedec)
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Azuma Kazufumi
Advanced Lcd Technologies Development Center Co. Ltd.
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Matsumura Masakiyo
Advanced Lcd Technologies Development Center Co. Ltd.(altedec)
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