New Phase Modulators for Next-Generation Low-Temperature Crystallization Method of Si Films
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概要
- 論文の詳細を見る
A conventional phase modulator having only “holes” (or “bumps”) on a quartz plate has been found to have insufficient depth-of-focus (DOF) characteristics. This poor DOF can be attributed to the phase advancement (or retardation) of the zeroth-order diffracted light wave. This phase effect has been applied to developing two types of modulator: one with a sufficiently large DOF, and the other, a single-plate phase modulator capable of producing a two-dimensional light intensity profile suitable for growing arrays of large grains. It was confirmed experimentally that this single-plate modulator could grow arrays of large grains 5 μm in pitch.
- 2006-10-15
著者
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Taniguchi Yukio
Advanced Lcd Technologies Development Center Co. Ltd. (altedec)
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Hiramatsu Masato
Advanced Lcd Technologies Development Center Co. Ltd.(altedec)
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Matsumura Masakiyo
Advanced Lcd Technologies Development Center Co. Ltd.(altedec)
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Katou Tomoya
Advanced LCD Technologies Development Center Co., Ltd. (ALTEDEC), 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan
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Katou Tomoya
Advanced LCD Technologies Development Center Co., Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan
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Taniguchi Yukio
Advanced LCD Technologies Development Center Co., Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan
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Hiramatsu Masato
Advanced LCD Technologies Development Center Co., Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan
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Matsumura Masakiyo
Advanced LCD Technologies Development Center Co., Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan
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