High-Resolution Beam Profiler for Engineering Laterally-Grown Grain Morphology(<Special Issue>Electronic Displays)
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概要
- 論文の詳細を見る
A two-dimensional laser beam profiler has been developed that can measure the intensity distribution on a sample surface of a single-shot of an excimer-laser light beam from not only the macroscopic viewpoint, but also the microscopic viewpoint, which is important to excimer-laser triggered lateral large-grain growth of Si. A resolution as fine as 0.4μm was obtained with a field of view of as large as 30μm×30μm. The effects of homogenizers, phase-shifters, and their combination on beam profiles were quantitatively investigated by using this apparatus. The relationship between the microscopic beam profile and the surface morphology of laterally grown grains was also examined.
- 社団法人電子情報通信学会の論文
- 2003-11-01
著者
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Kimura Y
Department Of Bioresource Science Faculty Of Agriculture Tottori University
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Kimura Y
Department Of Biological And Environmental Chemistry Faculty Of Agriculture Tottori University
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JYUMONJI Masayuki
Advanced LCD Technology Development Center Co., Ltd.
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MATSUMURA Masakiyo
Advanced LCD Technology Development Center Co., Ltd.
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Taniguchi Yukio
Advanced Lcd Technologies Development Center Co. Ltd. (altedec)
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Matsumura Masakiyo
Advanced Lcd Technology Development Center Co. Ltd.
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HIRAMATSU Masato
Advanced LCD Technologies Development Center Co., Ltd. (ALTEDEC)
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KIMURA Yoshinobu
Advanced LCD Technologies Development Center Co., Ltd. (ALTEDEC)
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Hiramatsu Masato
Advanced Lcd Technologies Development Center Co. Ltd.(altedec)
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Kimura Y
Advanced Lcd Technologies Development Center Co. Ltd.(altedec)
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Matsumura Masakiyo
Advanced Lcd Technologies Development Center Co. Ltd.(altedec)
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Taniguchi Yukio
Advanced Lcd Technologies Development Center Co. Ltd.(altedec)
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Jyumonji Masayuki
Advanced Lcd Technologies Development Center Co. Ltd.(altedec)
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