Influences of Grain Boundaries on Temperature Dependence of Device Characteristics and on Hot Carrier Effects in Low-Temperature Polycrystalline Silicon Thin Film Transistors Containing Large Grains

スポンサーリンク

概要

• 論文の詳細を見る

• The dependences of field-effect mobility, threshold voltage, and subthreshold slope on temperature for low-temperature polycrystalline silicon (LTPS) thin film transistors (TFTs) with large grains were investigated. It was shown that the temperature dependences of field-effect mobility and threshold voltage are affected by the temperature dependence of negatively charged grain-boundary-related interface traps near the surface of polycrystalline silicon, which is explained by considering that the degree of band bending at the surface when gate voltage is equal to threshold voltage decreases with increasing temperature. It was also shown that the behavior of a subthreshold slope can be explained using a term of the grain-boundary-related interface traps near the surface. Moreover, the effects of grain boundaries on hot-carrier generation and hot-carrier-induced degradation were investigated separately, and both processes were experimentally found to be affected by the grain boundaries.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2007-03-30

著者

• Miura Takafumi

  Interdisciplinary Faculty Of Science And Engineering Shimane University

• Matsumura Masakiyo

  Advanced Lcd Technologies Development Center Co. Ltd.(altedec)

• Kawachi Genshiro

  Advanced Lcd Technology Development Center Co. Ltd.

• Tsuchiya Toshiaki

  Interdisciplinary Faculty Of Science And Engineering Shimane University

• Matsumura Masakiyo

  Advanced LCD Technology Development Center Co., Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan

• Yamai Tsubasa

  Interdisciplinary Faculty of Science and Engineering, Shimane University, 1060 Nishikawatsu, Matsue 690-8504, Japan

• Kawachi Genshiro

  Advanced LCD Technologies Development Center Co., Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan

• Kawachi Genshiro

  Advanced LCD Technology Development Center Co., Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan

• Tsuchiya Toshiaki

  Interdisciplinary Faculty of Science and Engineering, Shimane University, 1060 Nishikawatsu, Matsue 690-8504, Japan

関連論文

• Low-Frequency Noise in Si_Ge_x p-Channel Metal Oxide Semiconductor Field-Effect Transistors : Semiconductors
• Characterization of High-Performance Polycrystalline Silicon Complementary Metal-Oxide-Semiconductor Circuits
• Impact of Hot Carrier Stress on Low-Frequency Noise Characteristics in Floating-Body Silicon-on-Insulator Metal Oxide Semiconductor Field-Effect Transistors
• Impact of Hot Carrier Stress on Low-Frequency Noise Characteristics in Floating-Body SOI MOSFETs
• High-Resolution Beam Profiler for Engineering Laterally-Grown Grain Morphology(Electronic Displays)
• High-Resolution Beam Profiler for Engineering Laterally-Grown Grain Morphology
• Water-Related Instability in Low-Temperature Polycrystalline Silicon Thin-Film Transistors Caused by Self-Heating
• Novel Optical Method for Widening Process Window of Phase-Modulated Excimer Laser Crystallization
• New Phase Modulators for Next-Generation Low-Temperature Crystallization Method of Si Films
• Quantitative Evaluation of Interface Traps in a Nanometer-Thick SiGe/Si Heterostructure in Hetero MOS Devices(Session 1 Silicon Devices I,AWAD2006)
• Quantitative Evaluation of Interface Traps in a Nanometer-Thick SiGe/Si Heterostructure in Hetero MOS Devices(Session 1 Silicon Devices I,AWAD2006)
• Direct Observation of Fluctuations in the Number and Individual Electronic Properties of Interface Traps in Nanoscale Metal–Oxide–Semiconductor Field-Effect Transistors
• Deposition of Pure Hydrogenated Amorphous Silicon by Plasma-Enhanced Chemical Vapor Deposition for Polycrystalline Silicon Thin Film Transistors
• Ultralong Silicon Grains Grown by Excimer Laser Crystallization
• Relationship between Thin-Film Transistor Characteristics and Crystallographic Orientation in Excimer-Laser-Processed Pseudo-Single-Crystal-Silicon Films
• High-Frequency Thin-Film Transistor Circuits for System Displays
• The Generation Process of Interface Traps by Hot-Carrier Injection in Nanoscale Metal-Oxide-Semiconductor Field-Effect Transistors (Special Issue : Solid State Devices and Materials (1))
• Channel Length and Time Dependent Interface Trap Generation near the Source Due to Hot-Carrier Injection in Metal--Oxide--Semiconductor Field-Effect Transistors
• Grain-Boundary Related Hot Carrier Degradation Mechanism in Low-Temperature Polycrystalline Silicon Thin-Film Transistors
• The Effect of Thick Interconnections Formed by Gold Electroplating on the Characteristics of Metal–Oxide–Semiconductor Field-Effect Transistors
• Ultrahigh-Performance Polycrystalline Silicon Thin-Film Transistors on Excimer-Laser-Processed Pseudo-Single-Crystal Films
• Characterization of Novel Polycrystalline Silicon Thin-Film Transistors with Long and Narrow Grains
• Influence of Doping Gradient near a Channel End on Parasitic Series Resistance of Thin-Film Fully-Depleted Metal–Oxide–Semiconductor Field-Effect Transistors
• Proposed Phase-Modulator Check System for Phase-Modulated Excimer-Laser Annealing
• Optimum Light Intensity Distribution for Growing Large Si Grains by Phase-Modulated Excimer-Laser Annealing
• Pseudo-Single-Nucleus Lateral Crystallization of Si Thin Films
• Influences of Grain Boundaries on Temperature Dependence of Device Characteristics and on Hot Carrier Effects in Low-Temperature Polycrystalline Silicon Thin Film Transistors Containing Large Grains
• Hot Carrier Degradation of SiGe/Si Heterointerface and Experimental Estimation of Density of Locally Generated Heterointerface Traps
• New Widening Method of Depth of Focus for Phase-Modulated Excimer-Laser Crystallization
• Body-Charge-Induced Switching Characteristics in Fully Depleted Silicon-on-Insulator Digital Circuits
• Importance of Pure Si Films in Pulsed-Laser-Induced Lateral Growth

もっと見る 閉じる

スポンサーリンク