Near-Field Distribution of Radial Line Slot Antenna for Surface-Wave-Coupled Plasma Generation
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-01-15
著者
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YAMAMOTO Tetsuya
Department of Neurosurgery, Graduate School of Comprehensive Human Sciences, University of Tsukuba
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ANDO Makoto
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology
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Ishii Nobuo
Corporate R&d Central Research Laboratory Tokyo Electron Ltd.
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GOTO Naohisa
Department of Electronics and Systems, Faculty of Engineering, Takushoku University
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Yamamoto T
Department Of Electrical And Electronic Engineering Faculty Of Engineering Yamagata University
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Yasaka Yasuyoshi
Department of Electronic Science and Engineering, Kyoto University
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ONO Mitsuhiro
Department of Electrical and Electronic Engineering, Faculty of Engineering, Yamagata University
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