ELS Study of Amorphous Si(Substrate)-SiO_2(Film Overlayer) System with Varying Primary Electron Energy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1981-06-05
著者
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ITO Toshimichi
Department of Electrical Engineering, Faculty of Engineering, Osaka University
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HIRAKI Akio
Department of Electrical Engineering, Faculty of Engineering, Osaka University
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Hiraki Akio
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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KATAOKA Yoshihide
Department of Electrical Engineering, Osaka University
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IWAMI Motohiro
Department of Electrical Engineering, Osaka University
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Hiraki Akio
The University Of Electro-communications
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Ito Toshimichi
Department Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka
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Iwami Motohiro
Department Of Electrical Engineering Osaka University
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Iwami Motohiro
Faculty Of Engineering Osaka University
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Iwami Motohiro
Department Of Electrical Engineering Kyoto University:(present Address) Department Of Electrical Eng
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Kataoka Yoshihide
Department Of Electrical Engineering Osaka University
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HORIIKE Akio
The University of Electro-Communications
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