Characterization of Hydrogenated Amorphous silicon: Some Behaviors of Hydrogen and Impurities Studied by Film Characterization Techniques : II-1: AMORPHOUS FILM PREPARATION AND CHARACTERIZATION (I)
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1980-06-01
著者
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KUBOTA Kazuyoshi
Department of Photonics, ATR Wave Engineering Laboratories
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HIRAKI Akio
Department of Electrical Engineering, Faculty of Engineering, Osaka University
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IMURA Takeshi
Department of Electrical Engineering, Osaka University
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Hiraki Akio
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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USHITA Katsumi
Department of Electrical Engineering, Osaka University
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Ushita Katsumi
Department Of Electrical Engineering Osaka University
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Kubota Kazuyoshi
Department Of Electrical Engineering Faculty Of Engineering Osaka University:central Research Labora
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Imura Takeshi
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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Imura Takeshi
Department of Chemistry, Faculty of Engineering Science, Osaka University
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