Preparation of sp^3-Rich Amorphous Carbon Film by Hydrogen Gas Reactive RF-Sputtering of Graphite, and Its Properties
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1984-04-20
著者
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HIRAKI Akio
Department of Electrical Engineering, Faculty of Engineering, Osaka University
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Hiraki Akio
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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MIYASATO Tatsuro
The Institute of Scientific and Industrial Research, Osaka University
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KAWAKAMI Youichi
Department of Electrical Engineering, Osaka University
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KAWANO Toshifumi
Department of Electrical Engineering, Osaka University
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Kawano Toshifumi
Department Of Electrical Engineering Osaka University
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Kawakami Youichi
Department Of Electrical Engineering Osaka University
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Miyasato Tatsuro
The Institute Of Scientific And Industrial Research Osaka University
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