Low Temperature Reactions at Si-Metal Contacts : From SiO_2 Growth due to Si-Au Reaction to the Mechanism of Silicide Formation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1983-04-20
著者
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HIRAKI Akio
Department of Electrical Engineering, Faculty of Engineering, Osaka University
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Hiraki Akio
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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Hiraki Akio
Department of Electrical Engineering, Osaka University
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