Changes of Structural, Electrical, and Optical Properties of Microcrystalline Si_xGe_<1-x> Films by Annealing

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1986-07-20

著者

• OSAKA Yukio

  Department of Electrical Engineering, Hiroshima University

• Kohno Kenji

  Department Of Electrical Engineering Hiroshima-denki Institute Of Technology

• NAKASHIMA Toshio

  Department of Materials Science, Faculty of Engineering, Tottori University

• IMURA Takeshi

  Department of Electrical Engineering, Osaka University

• IWAOKA Teiji

  Department of Electrical Engineering, Hiroshima University

• Nakashima Toshio

  Department Of Agricultural Biology Faculty Of Agriculture Hokkaido University

• Iwaoka T

  Department Of Electrical Engineering Hiroshima University:(present Address) Disco Abrasive Systems L

• Iwaoka Teiji

  Department Of Electrical Engineering Hiroshima University

• Osaka Y

  Department Of Electrical Engineering Hiroshima-denki Institute Of Technology

• Osaka Y

  Hiroshima Kokusaigakuin Univ. Hiroshima Jpn

• Osaka Yukio

  Department Of Electrical Engineering Faculty Of Engineering Hiroshima University

• Imura T

  Mitsubishi Paper Mills Ltd.

• Imura T

  Department Of Electrical Engineering Hiroshima University

• Imura Takeshi

  Department Of Electrical Engineering Faculty Of Engineering Osaka University

• Kohno K

  Hiroshima Kokusaigakuin Univ. Hiroshima Jpn

• Nakashita T

  Department Of Applied Physics Faculty Of Engineering Tokai University

• Nakashita Toshio

  Department Of Electrical Engineering Hiroshima University:(present Address) Department Of Applied Ph

• Nakashita Toshio

  Department Of Electrical Engineering Hiroshima University:(present Address) Department Of Applied Physics Tokai University

• Imura Takeshi

  Department of Chemistry, Faculty of Engineering Science, Osaka University

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