Reduction of Electron Temperature in rf Plasma Using Magnetic Filter
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概要
- 論文の詳細を見る
The radio frequency (rf) plasma was adopted to reduce electron temperature, using a magnetic filter. Detection of electron energy distribution functions with a grid analyzer facing the plasma source and the magnetic filter revealed that only the low energy electrons passed through the magnetic filter and the high energy electrons were reflected by the filter. A reduction of the rf oscillating potential was also observed after passing through the filter, using a novel method with an emissive probe. The reduction rate, expressed as a function of the ion hole parameter around the magnetic filter, was found too be described by a fixed curve for various ion species and neutral gas pressures.
- 社団法人応用物理学会の論文
- 1999-07-30
著者
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Hayashi Nobuya
Department Of Electrical And Eiectronic Engineering Faculty Of Science And Engineering Saga Universi
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Hayashi Nobuya
Department Of Electrical And Electronic Engineering Saga University
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Nakashima Toshio
Department Of Agricultural Biology Faculty Of Agriculture Hokkaido University
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Fujita Hiroharu
Department Of Electrical And Electronic Engineering Saga University
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Nakashima Toshiya
Department of Electrical and Electronic Engineering, Saga University
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Fujita Hiroharu
Department Of Electrical & Electronic Engineering Saga University
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Nakashima Toshiya
Department Of Electrical And Electronic Engineering Saga University
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