Potential Structure of Positively Biased Oscillating Substrate in a Low Pressure Plasma
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概要
- 論文の詳細を見る
- 1997-12-15
著者
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Hayashi Nobuya
Department of Electrical and Electronics Engineering
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Hayashi Nobuya
Department Of Electrical And Eiectronic Engineering Faculty Of Science And Engineering Saga Universi
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OHTSU Yasunori
Department of Electrical and Electronic Engineering, Graduate School of Science and Engineering, Sag
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Fujita H
Saga Univ. Saga Jpn
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Hayashi Nobuya
Department Of Electrical Engineering Saga University
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FUJITA Hiroharu
Department of Electrical and Electronic Engineering, Saga University
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Ohtsu Yasunori
Department Of Electrical & Electronic Engineering Saga University
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Fujita Hiroharu
Department Of Electrical And Electronic Engineering Saga University
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HASSAN Zahedul
Department of Electrical Engineering, Saga University
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Ohtsu Y
Saga Univ. Saga Jpn
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Hassan Zahedul
Department Of Electrical Engineering Saga University
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Fujita Hiroharu
Department Of Electrical & Electronic Engineering Saga University
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