Energy Distribution of Ions Incident onto a Dc-Biased Substrate in Electron Cyclotron Resonance Sputtering Plasma for SrTiO_3 Thin Film Preparation
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-01-15
著者
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OHTSU Yasunori
Department of Electrical and Electronic Engineering, Graduate School of Science and Engineering, Sag
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MIYAKE Shoji
Joining and Welding Research Institute, Osaka University
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FUJITA Hiroharu
Department of Electrical and Electronic Engineering, Saga University
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MATSUMOTO Takeshi
Joining and Welding Research Institute, Osaka University
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NIINO Atsushi
Joining and Welding Research Institute, Osaka University
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