Mode conversion of RF discharge in plasma driven by helical or spiral type antennas
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概要
- 論文の詳細を見る
- 1999-09-28
著者
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Fujita H
Saga Univ. Saga Jpn
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NASSER Mahmood
Department of Electrical and Electronic Engineering Saga University
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Fujita Hiroharu
Department Of Electrical & Electronic Engineering Saga University
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NASSER Mahmood
Department of Electrical and Electronic Engineering, Saga University
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