Ion Collection by a Hollow Probe in ECR Microwave Plasma under a Divergent Magnetic Field
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概要
- 論文の詳細を見る
Ion collection by a hollow probe has been studied in electron cyclotron resonance (ECR) microwave plasma under a divergent magnetic field where an ton beam was accelerated along the plasma axis. The ion current collected by the probe was found to consist of currents proportional to the geometric solid angle from the probe collector caused by the ion beam parallel to the probe axis. The effect of the ion beam energy and its injection angle to the probe has been also discussed.
- 社団法人応用物理学会の論文
- 1997-05-15
著者
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OHTSU Yasunori
Department of Electrical and Electronic Engineering, Graduate School of Science and Engineering, Sag
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FUJITA Hiroharu
Department of Electrical and Electronic Engineering, Saga University
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Ohtsu Yasunori
Department Of Electrical & Electronic Engineering Saga University
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Fujita Hiroharu
Department Of Electrical And Electronic Engineering Saga University
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KINOSHITA Kouichi
Department of Electrical Engineering, Saga University
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Fujita Hiroharu
Department Of Electrical & Electronic Engineering Saga University
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Kinoshita Kouichi
Department Of Electrical Engineering Saga University
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