Measurements of Ion Energy Distribution Functions in an Radio Frequency Plasma Excited with an m = 0 Mode Helical Antenna and Thin Film Preparation
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概要
- 論文の詳細を見る
Ion energy distribution functions were measured using an electrostatic analyzer in an Ar radio frequency plasma excited with a helical antenna in a magnetic field, where a plasma density jump occurred. The functions showed a two peak and a single peak profile before and after the density jump had occurred, respectively. The electron temperature and the plasma potential decreased after the density jump. The formation of CN films was also studied by sputtering a cylindrical graphite target in an Ar + N2 mixture.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-30
著者
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Miyake Shoji
Joining & Welding Resarch Institute Osaka University
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Ohtsu Yasunori
Department Of Electrical & Electronic Engineering Saga University
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Setsuhara Yuichi
Joining And Welding Research Institute Osaka University
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Tochitani Gen
Department Of Electrical Engineering Saga University
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Fujita Hiroharu
Department Of Electrical & Electronic Engineering Saga University
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Setsuhara Yuichi
Joining and Welding Research Institute, Osaka University,
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Zhang Jinqiu
Joining and Welding Research Institute, Osaka University,
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Fujita Hiroharu
Department of Electrical and Electronic Engineering, Saga University,
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Miyake Shoji
Joining and Welding Research Institute, Osaka University,
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Tochitani Gen
Department of Electrical and Electronic Engineering, Saga University,
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