Ion Assisted Deposition of Crystalline TiNi Films by electron Cyclotron Resonance Plasma Enhanced Sputtering
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-06-01
著者
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MIYAKE Shoji
Joining and Welding Research Institute, Osaka University
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Miyake S
Joining And Welding Research Institute Osaka University
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Miyake Shoji
Joining And Welding Research Institute Osaka University
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Miyake Shoji
Joining & Welding Resarch Institute Osaka University
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Setsuhara Yuichi
Joining And Welding Research Institute Osaka University
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Mishina Martin
Joining And Welding Research Institute Osaka University
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Misina Martin
Joining and Welding Research Institute, Osaka University
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