Formation of Carbon Nitride Films by Helicon Wave Plasma Enhanced DC Sputtering
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-11-15
著者
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SETSUHARA Yuichi
Joining and Welding Research Institute, Osaka University
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MIYAKE Shoji
Joining and Welding Research Institute, Osaka University
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Kyoh B
Kinki Univ. Higashi‐osaka Jpn
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Kyoh Bunkei
Faculty Of Science And Engineering Kinki University
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Miyake Shoji
Joining & Welding Resarch Institute Osaka University
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ZHANG Jin
Joining and Welding Research Institute, Osaka University
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Setsuhara Yuichi
Joining And Welding Research Institute Osaka University
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Zhang Jin
Joining And Welding Research Institute Osaka University
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